中国物理B ›› 2000, Vol. 9 ›› Issue (11): 833-836.doi: 10.1088/1009-1963/9/11/007
于文学1, 杨宁2, 陶琨2, 徐明3, 杨涛3, 刘翠秀3, 麦振洪3, 赖武彦3
Xu Ming (徐明)a, Yang Tao (杨涛)a, Yu Wen-xue (于文学)b, Yang Ning (杨宁)c, Liu Cui-xiu (刘翠秀)a, Mai Zhen-hong (麦振洪)a, Lai Wu-yan (赖武彦)a, Tao Kun (陶琨)c
摘要: A modified Bragg law for straightforward determining the film thickness by low-angle X-ray reflection was derived based on the geometrical optical theory. We showed that this modified Bragg law and its inference formulae could be used to accurately determine the thickness of the monolayer or multilayer film. Furthermore, the modified Bragg law for determining the superlattice period presented earlier by others can be derived from the above modified Bragg law. The similar inference formulae were also given. The precision in determining the film thickness and/or superlattice period by the above formulae was discussed.
中图分类号: (X-ray reflectometry (surfaces, interfaces, films))