An efficient algorithm for shadowing effect simulation under hexagonal lattice-based model

doi:10.1088/1674-1056/ae82e5

中国物理B ›› 2026, Vol. 35 ›› Issue (8): 86801-086801.doi: 10.1088/1674-1056/ae82e5

An efficient algorithm for shadowing effect simulation under hexagonal lattice-based model

Xiaolong Jiang(蒋晓龙)†, Xin Xiang(向欣), Xiaoyu Luan(栾晓雨), Haijun Wang(王海军), Baoshen Jia(贾宝申), Qinghua Deng(邓青华), Chuanchao Zhang(张传超), Wei Liao(廖威), Wei Ni(倪卫), and Qihua Zhu(朱启华)

Laser Fusion Research Center, China Academy of Engineering Physics, Mianyang 621900, China

收稿日期:2026-05-08 修回日期:2026-06-08 接受日期:2026-06-26 发布日期:2026-08-06
通讯作者: Xiaolong Jiang E-mail:xljiang@caep.cn
基金资助:
Project supported by the National Natural Science Foundation of China (Grant No. 12275254) and the Laser Fusion Research Center Funds for Young Talents (Grant No. RCFPD7-2024-7).

An efficient algorithm for shadowing effect simulation under hexagonal lattice-based model

Laser Fusion Research Center, China Academy of Engineering Physics, Mianyang 621900, China

Received:2026-05-08 Revised:2026-06-08 Accepted:2026-06-26 Published:2026-08-06
Contact: Xiaolong Jiang E-mail:xljiang@caep.cn
Supported by:
Project supported by the National Natural Science Foundation of China (Grant No. 12275254) and the Laser Fusion Research Center Funds for Young Talents (Grant No. RCFPD7-2024-7).

摘要/Abstract

摘要： This paper introduces an efficient algorithm for simulating the shadowing effect in hexagonal-lattice networks, addressing a critical gap in existing methods that are limited to cubic-lattice models. The shadowing effect significantly influences roughness development in processes such as film growth and plasma etching but has previously been impractical for hexagonal lattices due to its computational complexity. The proposed algorithm dramatically reduces computational load by strategically reducing the calculation dimensionality from three-dimensional (3D) to two-dimensional (2D) and handling the misaligned odd and even layers separately. This enables simulations on personal computers, with the typical simulation time decreasing from several days to less than one hour (achieving $>100\times$ acceleration). Validated simulations show consistent results with cubic-lattice models in both growth (roughening) and etching (smoothing) scenarios, while demonstrating superior symmetry in roughness formation. The work facilitates broader applications of shadowing simulations and integration with other hexagonal-lattice-based mechanisms.

关键词: thin film structure and morphology, Monte Carlo method, lattice theory and statistics, algorithm

Abstract: This paper introduces an efficient algorithm for simulating the shadowing effect in hexagonal-lattice networks, addressing a critical gap in existing methods that are limited to cubic-lattice models. The shadowing effect significantly influences roughness development in processes such as film growth and plasma etching but has previously been impractical for hexagonal lattices due to its computational complexity. The proposed algorithm dramatically reduces computational load by strategically reducing the calculation dimensionality from three-dimensional (3D) to two-dimensional (2D) and handling the misaligned odd and even layers separately. This enables simulations on personal computers, with the typical simulation time decreasing from several days to less than one hour (achieving $>100\times$ acceleration). Validated simulations show consistent results with cubic-lattice models in both growth (roughening) and etching (smoothing) scenarios, while demonstrating superior symmetry in roughness formation. The work facilitates broader applications of shadowing simulations and integration with other hexagonal-lattice-based mechanisms.

Key words: thin film structure and morphology, Monte Carlo method, lattice theory and statistics, algorithm

中图分类号: (Thin film structure and morphology)

68.55.-a

02.50.Ng (Distribution theory and Monte Carlo studies) 05.50.+q (Lattice theory and statistics) 02.60.Gf (Algorithms for functional approximation)

Xiaolong Jiang(蒋晓龙), Xin Xiang(向欣), Xiaoyu Luan(栾晓雨), Haijun Wang(王海军), Baoshen Jia(贾宝申), Qinghua Deng(邓青华), Chuanchao Zhang(张传超), Wei Liao(廖威), Wei Ni(倪卫), and Qihua Zhu(朱启华). An efficient algorithm for shadowing effect simulation under hexagonal lattice-based model[J]. 中国物理B, 2026, 35(8): 86801-086801.

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An efficient algorithm for shadowing effect simulation under hexagonal lattice-based model

An efficient algorithm for shadowing effect simulation under hexagonal lattice-based model

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