Micro-pinch formation and extreme ultraviolet emission of laser-induced discharge plasma

doi:10.1088/1674-1056/ac078f

中国物理B ›› 2021, Vol. 30 ›› Issue (9): 95207-095207.doi: 10.1088/1674-1056/ac078f

Micro-pinch formation and extreme ultraviolet emission of laser-induced discharge plasma

Jun-Wu Wang(王均武)¹, Xin-Bing Wang(王新兵)^1,†, Du-Luo Zuo(左都罗)¹, and Vassily S. Zakharov²

1 Wuhan National Research Center for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, China;
2 Keldysh Institute of Applied Mathematics, Russian Academy of Sciences, Moscow, Russia

收稿日期:2020-10-12 修回日期:2021-03-06 接受日期:2021-06-03 出版日期:2021-08-19 发布日期:2021-08-31
通讯作者: Xin-Bing Wang E-mail:xbwang@hust.edu.cn
基金资助:
Project supported by the Basic and Applied Basic Research Major Program of Guangdong Province, China (Grant No. 2019B030302003).

Micro-pinch formation and extreme ultraviolet emission of laser-induced discharge plasma

Jun-Wu Wang(王均武)¹, Xin-Bing Wang(王新兵)^1,†, Du-Luo Zuo(左都罗)¹, and Vassily S. Zakharov²

1 Wuhan National Research Center for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, China;
2 Keldysh Institute of Applied Mathematics, Russian Academy of Sciences, Moscow, Russia

Received:2020-10-12 Revised:2021-03-06 Accepted:2021-06-03 Online:2021-08-19 Published:2021-08-31
Contact: Xin-Bing Wang E-mail:xbwang@hust.edu.cn
Supported by:
Project supported by the Basic and Applied Basic Research Major Program of Guangdong Province, China (Grant No. 2019B030302003).

摘要/Abstract

摘要： Extreme ultraviolet (EUV) source produced by laser-induced discharge plasma (LDP) is a potential technical means in inspection and metrology. A pulsed Nd:YAG laser is focused on a tin plate to produce an initial plasma thereby triggering a discharge between high-voltage electrodes in a vacuum system. The process of micro-pinch formation during the current rising is recorded by a time-resolved intensified charge couple device camera. The evolution of electron temperature and density of LDP are obtained by optical emission spectrometry. An extreme ultraviolet spectrometer is built up to investigate the EUV spectrum of Sn LDP at 13.5 nm. The laser and discharge parameters such as laser energy, voltage, gap distance, and anode shape can influence the EUV emission.

关键词: laser-induced discharge plasma, micro-pinch, electron temperature and density, extreme ultraviolet spectra

Abstract: Extreme ultraviolet (EUV) source produced by laser-induced discharge plasma (LDP) is a potential technical means in inspection and metrology. A pulsed Nd:YAG laser is focused on a tin plate to produce an initial plasma thereby triggering a discharge between high-voltage electrodes in a vacuum system. The process of micro-pinch formation during the current rising is recorded by a time-resolved intensified charge couple device camera. The evolution of electron temperature and density of LDP are obtained by optical emission spectrometry. An extreme ultraviolet spectrometer is built up to investigate the EUV spectrum of Sn LDP at 13.5 nm. The laser and discharge parameters such as laser energy, voltage, gap distance, and anode shape can influence the EUV emission.

Key words: laser-induced discharge plasma, micro-pinch, electron temperature and density, extreme ultraviolet spectra

中图分类号: (Magnetohydrodynamics (including electron magnetohydrodynamics))

52.30.Cv

52.38.Mf (Laser ablation) 52.80.Vp (Discharge in vacuum) 32.30.Jc (Visible and ultraviolet spectra)

Jun-Wu Wang(王均武), Xin-Bing Wang(王新兵), Du-Luo Zuo(左都罗), and Vassily S. Zakharov. Micro-pinch formation and extreme ultraviolet emission of laser-induced discharge plasma[J]. 中国物理B, 2021, 30(9): 95207-095207.

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Micro-pinch formation and extreme ultraviolet emission of laser-induced discharge plasma

Micro-pinch formation and extreme ultraviolet emission of laser-induced discharge plasma

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