Improving the performance of crystalline Si solar cell by high-pressure hydrogenation

doi:10.1088/1674-1056/abb3e3

中国物理B ›› 2020, Vol. 29 ›› Issue (11): 118801-.doi: 10.1088/1674-1056/abb3e3

Xi-Yuan Dai(戴希远)¹, Yu-Chen Zhang(张宇宸)¹, Liang-Xin Wang(王亮兴)², Fei Hu(胡斐)¹, Zhi-Yuan Yu(于志远)¹, Shuai Li(李帅)¹, Shu-Jie Li(李树杰)³, Xin-Ju Yang(杨新菊)³, Ming Lu(陆明)¹^,†()

收稿日期:2020-04-01 修回日期:2020-08-21 接受日期:2020-09-01 出版日期:2020-11-05 发布日期:2020-11-03

Improving the performance of crystalline Si solar cell by high-pressure hydrogenation

Xi-Yuan Dai(戴希远)¹, Yu-Chen Zhang(张宇宸)¹, Liang-Xin Wang(王亮兴)², Fei Hu(胡斐)¹, Zhi-Yuan Yu(于志远)¹, Shuai Li(李帅)¹, Shu-Jie Li(李树杰)³, Xin-Ju Yang(杨新菊)³, and Ming Lu(陆明)^{1, †}

1 Department of Optical Science and Engineering and Shanghai Ultra-Precision Optical Manufacturing Engineering Center, Fudan University, Shanghai 200433, China
2 School of Microelectronics, Fudan University, Shanghai 200433, China
3 Department of Physics, Fudan University, Shanghai 200433, China

Received:2020-04-01 Revised:2020-08-21 Accepted:2020-09-01 Online:2020-11-05 Published:2020-11-03
Contact: ^†Corresponding author. E-mail: minglu55@fudan.edu.cn第一通讯作者
Supported by:
the National Natural Science Foundation of China (Grant No. 62075044), the Shanghai Science and Technology Committee, China (Grant No. 18JC1411500), and the CIOMP–Fudan University Joint Foundation (Grant No. FC2017-001).

摘要/Abstract

Abstract:

We report an approach of high-pressure hydrogenation to improve the performance of crystalline Si (c-Si) solar cells. As-received p-type c-Si wafer-based PN junctions were subjected to high-pressure (2.5 MPa) hydrogen atmosphere at 200 °C, followed by evaporating antireflection layers, passivation layers, and front and rear electrodes. The efficiency of the so prepared c-Si solar cell was found to increase evidently after high-pressure hydrogenation, with a maximal enhancement of 10%. The incorporation of hydrogen by Si solar cells was identified, and hydrogen passivation of dangling bonds in Si was confirmed. Compared to the regular approach of hydrogen plasma passivation, the approach of high-pressure hydrogenation reported here needs no post-hydrogenation treatment, and can be more convenient and efficient to use in improving the performances of the c-Si and other solar cells.

Key words: high-pressure hydrogenation, Si solar cell, bulk passivation

Xi-Yuan Dai(戴希远), Yu-Chen Zhang(张宇宸), Liang-Xin Wang(王亮兴), Fei Hu(胡斐), Zhi-Yuan Yu(于志远), Shuai Li(李帅), Shu-Jie Li(李树杰), Xin-Ju Yang(杨新菊), Ming Lu(陆明). [J]. 中国物理B, 2020, 29(11): 118801-.

Xi-Yuan Dai(戴希远), Yu-Chen Zhang(张宇宸), Liang-Xin Wang(王亮兴), Fei Hu(胡斐), Zhi-Yuan Yu(于志远), Shuai Li(李帅), Shu-Jie Li(李树杰), Xin-Ju Yang(杨新菊), and Ming Lu(陆明). Improving the performance of crystalline Si solar cell by high-pressure hydrogenation[J]. Chin. Phys. B, 2020, 29(11): 118801-.

图/表 10

参考文献 42

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Sample	J/mA⋅cm⁻²	V_OC/mV	FF/%	η/%	R_s/Ω	R_sh/Ω
0-day	37.3 ± 0.2	563 ± 3	82.2 ± 1.9	17.2 ± 0.4	1.0 ± 0.4	798 ± 341
3-day	39.3 ± 0.4	556 ± 3	83.7 ± 1.8	18.3 ± 0.3	0.7 ± 0.2	1005 ± 274
6-day	42.1 ± 0.6	551 ± 3	81.9 ± 2.2	19.0 ± 0.5	0.5 ± 0.1	1420 ± 460
9-day	40.3 ± 1.1	549 ± 2	80.0 ± 2.8	17.7 ± 0.5	0.8 ± 0.2	1009 ± 419

Improving the performance of crystalline Si solar cell by high-pressure hydrogenation

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