Nondestructive determination of film thickness with laser-induced surface acoustic waves

doi:10.1088/1674-1056/27/9/096802

中国物理B ›› 2018, Vol. 27 ›› Issue (9): 96802-096802.doi: 10.1088/1674-1056/27/9/096802

• CONDENSED MATTER: STRUCTURAL, MECHANICAL, AND THERMAL PROPERTIES • 上一篇下一篇

Nondestructive determination of film thickness with laser-induced surface acoustic waves

Xiao Xia(肖夏), Kong Tao(孔涛), Qi Hai Yang(戚海洋), Qing Hui Quan(秦慧全)

School of Microelectronic, Tianjin Key Laboratory of Imaging and Sensing Microelectronic Technology, Tianjin University, Tianjin 300072, China

收稿日期:2018-04-26 修回日期:2018-06-24 出版日期:2018-09-05 发布日期:2018-09-05
通讯作者: Xia Xiao E-mail:xiaxiao@tju.edu.cn
基金资助:
Project supported by the National Natural Science Foundation of China (Grant No. 61571319).

Nondestructive determination of film thickness with laser-induced surface acoustic waves

Xiao Xia(肖夏), Kong Tao(孔涛), Qi Hai Yang(戚海洋), Qing Hui Quan(秦慧全)

School of Microelectronic, Tianjin Key Laboratory of Imaging and Sensing Microelectronic Technology, Tianjin University, Tianjin 300072, China

Received:2018-04-26 Revised:2018-06-24 Online:2018-09-05 Published:2018-09-05
Contact: Xia Xiao E-mail:xiaxiao@tju.edu.cn
Supported by:
Project supported by the National Natural Science Foundation of China (Grant No. 61571319).

摘要/Abstract

摘要：

The application of surface acoustic waves (SAWs) for thickness measurement is presented. By studying the impact of film thickness h on the dispersion phenomenon of surface acoustic waves, a method for thickness determination based on theoretical dispersion curve v (fh) and experimental dispersion curve v (f) is developed. The method provides a series of thickness values at different frequencies f, and the mean value is considered as the final result of the measurement. The thicknesses of six interconnect films are determined by SAWs, and the results are compared with the manufacturer's data. The relative differences are in the range from 0.4% to 2.18%, which indicates that the surface acoustic wave technique is reliable and accurate in the nondestructive thickness determination for films. This method can be generally used for fast and direct determination of film thickness.

关键词: thickness measurement, dispersion curve, surface acoustic waves, layered structure

Abstract:

Key words: thickness measurement, dispersion curve, surface acoustic waves, layered structure

中图分类号: (Thickness)

68.55.jd

43.35.+d (Ultrasonics, quantum acoustics, and physical effects of sound) 61.05.-a (Techniques for structure determination)

肖夏, 孔涛, 戚海洋, 秦慧全. Nondestructive determination of film thickness with laser-induced surface acoustic waves[J]. 中国物理B, 2018, 27(9): 96802-096802.

Xiao Xia(肖夏), Kong Tao(孔涛), Qi Hai Yang(戚海洋), Qing Hui Quan(秦慧全). Nondestructive determination of film thickness with laser-induced surface acoustic waves[J]. Chin. Phys. B, 2018, 27(9): 96802-096802.

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Nondestructive determination of film thickness with laser-induced surface acoustic waves

Nondestructive determination of film thickness with laser-induced surface acoustic waves

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