Chin. Phys. B ›› 2013, Vol. 22 ›› Issue (12): 127801-127801.doi: 10.1088/1674-1056/22/12/127801

• CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES • 上一篇    下一篇

Phase shift of polarized light through sculptured thin films：Experimental measurements and theoretical study

侯永强a b, 齐红基a, 李煦a, 何凯a, 易葵a, 邵建达a   

  1. a Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China;
    b Shanghai Huali Microelectronics Corporation, Shanghai 201203, China
  • 收稿日期:2013-03-21 修回日期:2013-05-08 出版日期:2013-10-25 发布日期:2013-10-25
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant No. 61205211).

Phase shift of polarized light through sculptured thin films：Experimental measurements and theoretical study

Hou Yong-Qiang (侯永强)a b, Qi Hong-Ji (齐红基)a, Li Xu (李煦)a, He Kai (何凯)a, Yi Kui (易葵)a, Shao Jian-Da (邵建达)a   

  1. a Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China;
    b Shanghai Huali Microelectronics Corporation, Shanghai 201203, China
  • Received:2013-03-21 Revised:2013-05-08 Online:2013-10-25 Published:2013-10-25
  • Contact: Qi Hong-Ji E-mail:qhj@mail.siom.ac.cn
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant No. 61205211).

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摘要： A slanted columnar TiO2 sculptured anisotropic thin film (ATF) is prepared via the glancing angle deposition technique and used as the phase retardation plate. The tilted nanocolumn microstructures of thin film induce the optical anisotropy. With the biaxial birefringent model, the optical constants dispersion equations of TiO2 ATF are derived by fitting the transmittance spectra for s-and p-polarized waves measured at normal and oblique incidence within 400 nm–1200 nm. The phase shift of polarized light after reflection and/or transmission through the TiO2 ATF is analyzed with the characteristic matrix employing the extracted structure parameters. The theoretical studies reasonably well accord with the experimental results measured with spectroscopic ellipsometry. In addition, the dependences of the phase shift on the coating physical thickness and oblique incidence angle are also discussed. Birefringence of the biaxial ATF provides a sophisticated phase modulation by varying incidence angles over a broad range to have a wide-angle phase shift.

关键词: birefringence, thin films, optical properties, phase shift

Abstract: A slanted columnar TiO2 sculptured anisotropic thin film (ATF) is prepared via the glancing angle deposition technique and used as the phase retardation plate. The tilted nanocolumn microstructures of thin film induce the optical anisotropy. With the biaxial birefringent model, the optical constants dispersion equations of TiO2 ATF are derived by fitting the transmittance spectra for s-and p-polarized waves measured at normal and oblique incidence within 400 nm–1200 nm. The phase shift of polarized light after reflection and/or transmission through the TiO2 ATF is analyzed with the characteristic matrix employing the extracted structure parameters. The theoretical studies reasonably well accord with the experimental results measured with spectroscopic ellipsometry. In addition, the dependences of the phase shift on the coating physical thickness and oblique incidence angle are also discussed. Birefringence of the biaxial ATF provides a sophisticated phase modulation by varying incidence angles over a broad range to have a wide-angle phase shift.

Key words: birefringence, thin films, optical properties, phase shift

中图分类号:  (Birefringence)

  • 78.20.Fm
78.20.Ci (Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity)) 42.25.Ja (Polarization)