中国物理B ›› 2001, Vol. 10 ›› Issue (13): 174-178.

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DIAMOND MICRO- AND NANOSTRUCTURING BY ACCELERATED CLUSTER EROSION

C. Becker, J. Gspann, R. KrÄmer, Y. Yamaguchi   

  1. Universität Karlsruhe und Forschungszentrum Karlsruhe, Institut für Mikrostrukturtechnik, Postfach 3640, D-76021 Karlsruhe, Germany
  • 收稿日期:2001-03-28 出版日期:2001-12-25 发布日期:2005-07-07
  • 基金资助:
    Project supported by the Grant-in-Aid for JSPS Fellows (Grant No. 11-08826) from the Ministry of Education, Science, Sports and Culture, Japan.

DIAMOND MICRO- AND NANOSTRUCTURING BY ACCELERATED CLUSTER EROSION

C. Becker, J. Gspann, R. KrÄmer, Y. Yamaguchi   

  1. Universität Karlsruhe und Forschungszentrum Karlsruhe, Institut für Mikrostrukturtechnik, Postfach 3640, D-76021 Karlsruhe, Germany
  • Received:2001-03-28 Online:2001-12-25 Published:2005-07-07
  • Supported by:
    Project supported by the Grant-in-Aid for JSPS Fellows (Grant No. 11-08826) from the Ministry of Education, Science, Sports and Culture, Japan.

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摘要： Reactive accelerated cluster erosion (RACE) has been used for direct micro- and nanostructuring of bulk diamond. Carbondioxide nanoparticles of about 1000 molecules are accelerated to 100keV energy in order to erode a staircase structure or a toothed wheel into diamond by using appropriate movable or fixed masks. Non-reactive erosion by argon clusters is slower but more effectively polishing. Large-scale molecular dynamics simulations show the nanoparticle impacts to lead to transient craters which relax to a very smooth surface via collective elastic recovery. The enhanced or reduced erosion of the respective cluster material is illuminated.

关键词: cluster impact, nano-structuring, molecular dynamics simulation

Abstract: Reactive accelerated cluster erosion (RACE) has been used for direct micro- and nanostructuring of bulk diamond. Carbondioxide nanoparticles of about 1000 molecules are accelerated to 100keV energy in order to erode a staircase structure or a toothed wheel into diamond by using appropriate movable or fixed masks. Non-reactive erosion by argon clusters is slower but more effectively polishing. Large-scale molecular dynamics simulations show the nanoparticle impacts to lead to transient craters which relax to a very smooth surface via collective elastic recovery. The enhanced or reduced erosion of the respective cluster material is illuminated.

Key words: cluster impact, nano-structuring, molecular dynamics simulation

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  • 3450D