中国物理B ›› 2001, Vol. 10 ›› Issue (13): 167-173.

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PIEZOELECTRIC Pb(Zr, Ti)O3 MICRO-DEVICES FOR SCANNING FORCE MICROSCOPY AND ULTRA-DENSITY DATA STORAGE

伊藤寿浩1, 须贺唯知1, 褚家如2, 黄文浩2, 前田龙太郎3   

  1. (1)Department of Precision Engineering, the University of Tokyo, Tokyo, Japan; (2)Department of Precision Machinery and Instrumentation, University of Science and Technology of China, Hefei 230026, China; (3)National Institute of Advanced Industrial Science and Technology, Namiki 1-2, Tsukuba, Ibaraki, Japan
  • 收稿日期:2001-03-28 出版日期:2001-12-25 发布日期:2005-07-07

PIEZOELECTRIC Pb(Zr, Ti)O3 MICRO-DEVICES FOR SCANNING FORCE MICROSCOPY AND ULTRA-DENSITY DATA STORAGE

Chu Jia-ru (褚家如)a, Huang Wen-hao (黄文浩)a, R. Maeda (前田龙太郎)b, T. Itoh (伊藤寿浩)c, T. Suga (须贺唯知)c   

  1. a Department of Precision Machinery and Instrumentation, University of Science and Technology of China, Hefei 230026, China; b National Institute of Advanced Industrial Science and Technology, Namiki 1-2, Tsukuba, Ibaraki, Japan; c Department of Precision Engineering, the University of Tokyo, Tokyo, Japan
  • Received:2001-03-28 Online:2001-12-25 Published:2005-07-07

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摘要： In this paper we report two types of micro devices based on Pb(Zr, Ti)O3 (PZT) thin films for improving the throughput of scanning force microscopy (SFM) or data storage using SFM. One is a piezoelectric cantilever array integrated with force sensor as well as z-actuator on each cantilever for parallel operation. The 125-μm-long PZT micro cantilever with a natural resonant frequency of 189 kHz has a high actuation sensitivity of 75 nm/V. Independent parallel images using two cantilevers of the array were obtained. The other is a novel micro-SFM device that is expected to replace the cantilever, the deflection detection unit, and the macro-fabricated scanner which is the bottle neck limiting the single probe acquisition rate. The bridge-structured device has shown a microscopy sensitivity of 0.32 nA/nm in vertical direction and actuation abilities of 70-80nm/±V in the lateral direction.

Abstract: In this paper we report two types of micro devices based on Pb(Zr, Ti)O3 (PZT) thin films for improving the throughput of scanning force microscopy (SFM) or data storage using SFM. One is a piezoelectric cantilever array integrated with force sensor as well as z-actuator on each cantilever for parallel operation. The 125-μm-long PZT micro cantilever with a natural resonant frequency of 189 kHz has a high actuation sensitivity of 75 nm/V. Independent parallel images using two cantilevers of the array were obtained. The other is a novel micro-SFM device that is expected to replace the cantilever, the deflection detection unit, and the macro-fabricated scanner which is the bottle neck limiting the single probe acquisition rate. The bridge-structured device has shown a microscopy sensitivity of 0.32 nA/nm in vertical direction and actuation abilities of 70-80nm/±V in the lateral direction.

Key words: scanning force microscopy, piezoelectric microdevice, ultra density data storage

中图分类号: 

  • 0779