中国物理B ›› 2025, Vol. 34 ›› Issue (11): 114701-114701.doi: 10.1088/1674-1056/addbcc

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Experimental study on characteristics of isopropanol ejection driven by electrohydrodynamics

Xi-Hao Zhang(张玺皓)1,3, Wen-Hua Wang (王文华)1, Cheng-Nan He(何承南)1, Yi-Chi Yao(姚奕弛)1, Bo-Yu Wang (王博宇)1, Xue-Hong Li(李学红)2, Zhi-Jian Wang(王智健)1, Chen Qiu(邱晨)1, Hai-Yi Sun(孙海轶)2, Yu-Xin Leng(冷雨欣)2,†, and Gang Xin(新刚)1,‡   

  1. 1 Department of Advanced Optical and Microelectronic Equipment, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China;
    2 State Key Laboratory of Ultra-intense Laser Science and Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China;
    3 Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences, Hangzhou 310024, China
  • 收稿日期:2025-03-31 修回日期:2025-05-14 接受日期:2025-05-22 发布日期:2025-11-10
  • 通讯作者: Yu-Xin Leng, Gang Xin E-mail:lengyuxin@mail.siom.ac.cn;xingang@siom.ac.cn
  • 基金资助:
    Project supported by the Strategic Priority Research Program of the Chinese Academy of Sciences (Grant Nos. XDA 0380000 and 0380300).

Experimental study on characteristics of isopropanol ejection driven by electrohydrodynamics

Xi-Hao Zhang(张玺皓)1,3, Wen-Hua Wang (王文华)1, Cheng-Nan He(何承南)1, Yi-Chi Yao(姚奕弛)1, Bo-Yu Wang (王博宇)1, Xue-Hong Li(李学红)2, Zhi-Jian Wang(王智健)1, Chen Qiu(邱晨)1, Hai-Yi Sun(孙海轶)2, Yu-Xin Leng(冷雨欣)2,†, and Gang Xin(新刚)1,‡   

  1. 1 Department of Advanced Optical and Microelectronic Equipment, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China;
    2 State Key Laboratory of Ultra-intense Laser Science and Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China;
    3 Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences, Hangzhou 310024, China
  • Received:2025-03-31 Revised:2025-05-14 Accepted:2025-05-22 Published:2025-11-10
  • Contact: Yu-Xin Leng, Gang Xin E-mail:lengyuxin@mail.siom.ac.cn;xingang@siom.ac.cn
  • About author:2025-114701-250540.pdf
  • Supported by:
    Project supported by the Strategic Priority Research Program of the Chinese Academy of Sciences (Grant Nos. XDA 0380000 and 0380300).

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摘要： A droplet generator is one of a key module for realizing the Sn-LPP EUV light source. One way of improving a conversion efficiency (CE) and relax tin contamination issue of Sn-LPP EUV light source is to produce tin droplet targets with suitable size. Less than several 10-μm nozzles are used to generate tin droplets. Particles from environment and chemical reaction compounds with high temperature tin cause nozzle clogging issue often. It is significant to develop a technical approach using a large diameter nozzle to produce mass-limited targets. Therefore, this paper demonstrated droplet ejection experiments based on electrohydrodynamics (EHD). Characteristics of isopropanol (IPA) droplet ejection by EHD droplet production platform that was designed and constructed in our laboratory. Characteristics of various process parameters on the IPA droplet production process were investigated. Images of droplet formation process were observed by using a droplet observation system and analyzed by image analysis software. Consequently, the smallest IPA droplet with a diameter of 13 μm could be produced using a nozzle with a diameter of 50 μm. Additionally, the EHD method could make droplets from 13 μm to 55 μm with applying voltage from 5.5 kV to 2.5 kV. In the future, EHD will apply to make mass-limited tin droplet targets under vacuum and high-temperature conditions, in order to increase the CE and to decrease tin debris.

关键词: EUV light source, electrohydrodynamics, droplet generation, isopropanol

Abstract: A droplet generator is one of a key module for realizing the Sn-LPP EUV light source. One way of improving a conversion efficiency (CE) and relax tin contamination issue of Sn-LPP EUV light source is to produce tin droplet targets with suitable size. Less than several 10-μm nozzles are used to generate tin droplets. Particles from environment and chemical reaction compounds with high temperature tin cause nozzle clogging issue often. It is significant to develop a technical approach using a large diameter nozzle to produce mass-limited targets. Therefore, this paper demonstrated droplet ejection experiments based on electrohydrodynamics (EHD). Characteristics of isopropanol (IPA) droplet ejection by EHD droplet production platform that was designed and constructed in our laboratory. Characteristics of various process parameters on the IPA droplet production process were investigated. Images of droplet formation process were observed by using a droplet observation system and analyzed by image analysis software. Consequently, the smallest IPA droplet with a diameter of 13 μm could be produced using a nozzle with a diameter of 50 μm. Additionally, the EHD method could make droplets from 13 μm to 55 μm with applying voltage from 5.5 kV to 2.5 kV. In the future, EHD will apply to make mass-limited tin droplet targets under vacuum and high-temperature conditions, in order to increase the CE and to decrease tin debris.

Key words: EUV light source, electrohydrodynamics, droplet generation, isopropanol

中图分类号:  (Surface-tension-driven instability)

  • 47.20.Dr
47.55.db (Drop and bubble formation) 47.55.nb (Capillary and thermocapillary flows) 47.65.-d (Magnetohydrodynamics and electrohydrodynamics)