Silicon-based optoelectronic heterogeneous integration for optical interconnection

doi:10.1088/1674-1056/ad0e5b

中国物理B ›› 2024, Vol. 33 ›› Issue (2): 24201-024201.doi: 10.1088/1674-1056/ad0e5b

所属专题： SPECIAL TOPIC — Post-Moore era: Materials and device physics

Silicon-based optoelectronic heterogeneous integration for optical interconnection

Le-Liang Li(李乐良)^1,2, Gui-Ke Li(李贵柯)^1,2, Zhao Zhang(张钊)^1,2, Jian Liu(刘剑)^1,2, Nan-Jian Wu(吴南健)^1,2, Kai-You Wang(王开友)^1,2, Nan Qi(祁楠)^1,2,†, and Li-Yuan Liu(刘力源)^1,2

1 Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China;
2 Center of Material Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

收稿日期:2023-09-15 修回日期:2023-11-20 接受日期:2023-11-21 出版日期:2024-01-16 发布日期:2024-01-19
通讯作者: Nan Qi E-mail:qinan@semi.ac.cn
基金资助:
Project supported in part by the National Key Research and Development Program of China (Grant No. 2021YFB2206504), the National Natural Science Foundation of China (Grant No. 62235017), and the China Postdoctoral Science Foundation (Grant No. 2021M703125).

Silicon-based optoelectronic heterogeneous integration for optical interconnection

1 Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China;
2 Center of Material Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

Received:2023-09-15 Revised:2023-11-20 Accepted:2023-11-21 Online:2024-01-16 Published:2024-01-19
Contact: Nan Qi E-mail:qinan@semi.ac.cn
Supported by:
Project supported in part by the National Key Research and Development Program of China (Grant No. 2021YFB2206504), the National Natural Science Foundation of China (Grant No. 62235017), and the China Postdoctoral Science Foundation (Grant No. 2021M703125).

摘要/Abstract

摘要： The performance of optical interconnection has improved dramatically in recent years. Silicon-based optoelectronic heterogeneous integration is the key enabler to achieve high performance optical interconnection, which not only provides the optical gain which is absent from native Si substrates and enables complete photonic functionalities on chip, but also improves the system performance through advanced heterogeneous integrated packaging. This paper reviews recent progress of silicon-based optoelectronic heterogeneous integration in high performance optical interconnection. The research status, development trend and application of ultra-low loss optical waveguides, high-speed detectors, high-speed modulators, lasers and 2D, 2.5D, 3D and monolithic integration are focused on.

关键词: silicon-based heterogeneous integration, heterogeneous integrated materials, heterogeneous integrated packaging, optical interconnection

Abstract: The performance of optical interconnection has improved dramatically in recent years. Silicon-based optoelectronic heterogeneous integration is the key enabler to achieve high performance optical interconnection, which not only provides the optical gain which is absent from native Si substrates and enables complete photonic functionalities on chip, but also improves the system performance through advanced heterogeneous integrated packaging. This paper reviews recent progress of silicon-based optoelectronic heterogeneous integration in high performance optical interconnection. The research status, development trend and application of ultra-low loss optical waveguides, high-speed detectors, high-speed modulators, lasers and 2D, 2.5D, 3D and monolithic integration are focused on.

Key words: silicon-based heterogeneous integration, heterogeneous integrated materials, heterogeneous integrated packaging, optical interconnection

中图分类号: (Integrated optics)

42.82.-m

79.60.Jv (Interfaces; heterostructures; nanostructures) 85.60.Bt (Optoelectronic device characterization, design, and modeling) 42.79.Sz (Optical communication systems, multiplexers, and demultiplexers?)

Le-Liang Li(李乐良), Gui-Ke Li(李贵柯), Zhao Zhang(张钊), Jian Liu(刘剑), Nan-Jian Wu(吴南健), Kai-You Wang(王开友), Nan Qi(祁楠), and Li-Yuan Liu(刘力源). Silicon-based optoelectronic heterogeneous integration for optical interconnection[J]. 中国物理B, 2024, 33(2): 24201-024201.

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Silicon-based optoelectronic heterogeneous integration for optical interconnection

Silicon-based optoelectronic heterogeneous integration for optical interconnection

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