Techniques of microwave permeability characterization for thin films

doi:10.1088/1674-1056/ab3a8a

中国物理B ›› 2019, Vol. 28 ›› Issue (9): 97504-097504.doi: 10.1088/1674-1056/ab3a8a

• TOPICAL REVIEW-110th Anniversary of Lanzhou University • 上一篇下一篇

Techniques of microwave permeability characterization for thin films

Xi-Ling Li(李喜玲), Jian-Bo Wang(王建波), Guo-Zhi Chai(柴国志)

1 Key Laboratory for Magnetism and Magnetic Materials of the Ministry of Education, Lanzhou University, Lanzhou 730000, China;
2 Key Laboratory for Special Function Materials and Structural Design of the Ministry of Education, Lanzhou University, Lanzhou 730000, China;
3 National Demonstration Center for Experimental Physics Education, Lanzhou University, Lanzhou 730000, China

收稿日期:2019-06-10 修回日期:2019-08-05 出版日期:2019-09-05 发布日期:2019-09-05
通讯作者: Guo-Zhi Chai E-mail:chaigzh@lzu.edu.cn
基金资助:
Project supported by the National Natural Science Foundation of China (Grant Nos. 51871117, 51471080, and 51771086), the Fundamental Research Funds for the Central Universities of Lanzhou University, China (Grant No. lzujbky-2019-kb06), and the Basic Scientific Research Business Expenses of the Central University and Open Project of Key Laboratory for Magnetism and Magnetic Materials of the Ministry of Education, Lanzhou University, China (Grant No. LZUMMM2019004).

Techniques of microwave permeability characterization for thin films

Xi-Ling Li(李喜玲)^1,2,3, Jian-Bo Wang(王建波)^1,2, Guo-Zhi Chai(柴国志)^1,2

1 Key Laboratory for Magnetism and Magnetic Materials of the Ministry of Education, Lanzhou University, Lanzhou 730000, China;
2 Key Laboratory for Special Function Materials and Structural Design of the Ministry of Education, Lanzhou University, Lanzhou 730000, China;
3 National Demonstration Center for Experimental Physics Education, Lanzhou University, Lanzhou 730000, China

Received:2019-06-10 Revised:2019-08-05 Online:2019-09-05 Published:2019-09-05
Contact: Guo-Zhi Chai E-mail:chaigzh@lzu.edu.cn
Supported by:
Project supported by the National Natural Science Foundation of China (Grant Nos. 51871117, 51471080, and 51771086), the Fundamental Research Funds for the Central Universities of Lanzhou University, China (Grant No. lzujbky-2019-kb06), and the Basic Scientific Research Business Expenses of the Central University and Open Project of Key Laboratory for Magnetism and Magnetic Materials of the Ministry of Education, Lanzhou University, China (Grant No. LZUMMM2019004).

摘要/Abstract

摘要：

We review the microwave methods to characterize the material properties, including the established and the emerging techniques in material characterization, especially the permeability spectra of the magnetic thin films. Almost all aspects of the microwave techniques for characterizing the permeability of thin films at microwave frequencies, including the new methods developed by our group, are presented. Firstly, the introduction part is presented. Secondly, the coaxial-line with transmission/reflection methods and the pickup coil with electromagnetic induction method are presented. Thirdly, the most widely used shorted microstrip technique is discussed in detail by the equivalent circuit method, transmission line method, and electromagnetic induction method. Fourthly, the coplanar waveguide method and the near-field probe method are also introduced. Finally, the high temperature permeability characterization by using the shorted microstrip line, the near-field microwave probe, and the shorted microstrip line probe are described in detail. This paper may be useful for researchers or engineers who will build up such measurement fixture to make full use of the existing methods or to develop original methods to meet the requirements for ever-rising measurements.

关键词: high frequency permeability, coaxial-line methods, induction coil method, shorted microstrip technique, coplanar waveguide method

Abstract:

Key words: high frequency permeability, coaxial-line methods, induction coil method, shorted microstrip technique, coplanar waveguide method

中图分类号: (Dynamic properties?)

75.40.Gb

84.40.Az (Waveguides, transmission lines, striplines) 76.50.+g (Ferromagnetic, antiferromagnetic, and ferrimagnetic resonances; spin-wave resonance)

李喜玲, 王建波, 柴国志. Techniques of microwave permeability characterization for thin films[J]. 中国物理B, 2019, 28(9): 97504-097504.

Xi-Ling Li(李喜玲), Jian-Bo Wang(王建波), Guo-Zhi Chai(柴国志). Techniques of microwave permeability characterization for thin films[J]. Chin. Phys. B, 2019, 28(9): 97504-097504.

参考文献 85

[42]	Sheng S, Wang P, Zhang X Y and Ong C K 2009 J. Phys. D:Appl. Phys. 42 015501 doi: 10.1088/0022-3727/42/1/015501
[1]	Liu Y, Liu Z W, Tan C Y and Ong C K 2006 J. Appl. Phys. 100 093912 doi: 10.1063/1.2361160
[43]	Kostylev M 2016 J. Appl. Phys. 119103903
[2]	Xu C, Yi Z, Meng L, Huang K and Dai J 2019 IOP Conf. Ser.:Earth Environ. Sci. 237 032021 doi: 10.1088/1755-1315/237/3/032021
[44]	Nicolson A M and Ross G F 1968 IEEE Trans. Instrum. Meas. 17 395 doi: 10.1109/TIM.1968.4313741
[3]	Zyatkov D, Yurchenko A, Yurchenko V and Balashov V 2018 IOP Conf. Ser.:Mater. Sci. Eng. 363 012023 doi: 10.1088/1757-899X/363/1/012023
[45]	Hammerstad E D 1975 Eur. Microwave Conf. Proc. 268
[4]	Liu Q, Xue G, Tan X, Yu H and Yu Y 2017 Chin. Phys. B 26 058402 doi: 10.1088/1674-1056/26/5/058402
[46]	Wheeler H A 1977 IEEE Trans. Microwave Theory Tech. 25 631 doi: 10.1109/TMTT.1977.1129179
[5]	Huang J, Gu W, Zhao Q 2017 Chin. Phys. B 26 037306 doi: 10.1088/1674-1056/26/3/037306
[47]	Grimes C A and Prodan J V 1993 J. Appl. Phys. 73 6989 doi: 10.1063/1.352407
[6]	Acher O, Le Gourrierec P, Perrin G, Baclet P and Roblin O 1996 IEEE Trans. Microwave Theory Techniq. 44674
[48]	Weir W W 1974 Proc. IEEE 62 33 doi: 10.1109/PROC.1974.9382
[7]	Viala B, Couderc S, Royet A S, Ancey P and Bouche G 2005 IEEE Trans. Magn. 41 3544 doi: 10.1109/TMAG.2005.854727
[49]	Cagan V and Guyot M 1984 IEEE Trans. Magn. 20 1732 doi: 10.1109/TMAG.1984.1063470
[8]	Ledieu M, Adenot A L and Acher O 2000 IEEE Trans. Magn. 36 3254 doi: 10.1109/20.908759
[50]	Grimes C A, Trouilloud P L and Walser R M 1988 IEEE Trans. Magn. 24 603 doi: 10.1109/20.43991
[9]	Hung L T, Phuoc N N, Wang X C and Ong C K 2011 Rev. Sci. Instrum. 82 084701 doi: 10.1063/1.3622850
[51]	Bekker V, Seemann K and Leiste H 2004 J. Magn. Magn. Mater. 270 327 doi: 10.1016/j.jmmm.2003.08.033
[10]	Yabukami S, Sato A, Takahashi J, Ozawa T, Miyazawa Y, Yanagi K, Shimada Y, Munakata M and Shiokawa T 2011 IEEE Trans. Magn. 47 2570 doi: 10.1109/TMAG.2011.2158396
[52]	Jiang J, Du G, Yao Y, Liu C, Yuan L, Bie S, Zhang X and He H 2008 J. Magn. Magn. Mater. 320 750 doi: 10.1016/j.jmmm.2007.08.012
[11]	Jacquart P M and Roux L 2004 J. Magn. Magn. Mater. 28182
[53]	Wu Y, Tang Z, Xu Y, Zhang B and He X 2010 IEEE Trans. Magn. 46 886 doi: 10.1109/TMAG.2009.2030886
[12]	Bekker V, Seemann K and Leiste H 2004 J. Magn. Magn. Mater. 270 327 doi: 10.1016/j.jmmm.2003.08.033
[54]	Steinhauer D E, Vlahacos C P, Wellstood F C, Anlage S M, Canedy C, Ramesh R, Stanishevsky A and Melngailis J 2000 Rev. Sci. Instrum. 71 2751 doi: 10.1063/1.1150687
[13]	Wei J, Feng H, Zhu Z, Liu Q and Wang J 2015 Rev. Sci. Instrum. 86114705
[55]	Gilbert T L 2004 IEEE Trans. Magn. 40 3443 doi: 10.1109/TMAG.2004.836740
[14]	Wei J, Wang J, Liu Q, Li X, Cao D and Sun X 2014 Rev. Sci. Instrum. 85 054705 doi: 10.1063/1.4876598
[56]	Kalarickal S S, Krivosik P, Wu M, Patton C E, chneider M L, Kabos P, Silva T J and Nibarger J P 2006 J. Appl. Phys. 99093909
[15]	Sun N X and Srinivasan G 2012 Spin 2 1240004 doi: 10.1142/S2010324712400048
[57]	Bilzer C, Devolder T, Crozat P and Chappert C 2008 IEEE Trans. Magn. 44 3265 doi: 10.1109/TMAG.2008.2004379
[16]	Phuoc N N, Xu F and Ong C K 2009 Appl. Phys. Lett. 94 092505 doi: 10.1063/1.3094881
[58]	Beguhn S, Zhou Z, R, S, Yang X, Lou J and Sun N X 2012 J. Appl. Phys. 111 07A503
[17]	Tselev A, Anlage S M, Ma Z and Melngailis J 2007 Rev. Sci. Instrum. 78044701
[59]	Dutra R, Gonzalez-Chavez D E, Marcondes T L, Andrade A M H D, Geshev J and Sommer R L 2013 J. Magn. Magn. Mater. 346 1 doi: 10.1016/j.jmmm.2013.06.040
[18]	Gao C, Wei T, Duewer F, Lu Y and Xiang X D 1997 Appl. Phys. Lett. 711872
[60]	He S and Panagopoulos C 2016 Rev. Sci. Instrum. 87 043110 doi: 10.1063/1.4946789
[19]	Lubell M S and Venturino A S 1960 Rev. Sci. Instrum. 31 207 doi: 10.1063/1.1716932
[61]	Lee S C, Vlahacos C P, Feenstra B J, Schwartz A, Steinhauer D E, Wellstood F C and Anlage S M 2000 Appl. Phys. Lett. 77 4404 doi: 10.1063/1.1332978
[20]	Yamaguchi M, Baba M, Suezawa K, Moizumi T, Arai K I, Haga A, Shimada Y, Tanabe S and Itho K 2000 IEEE Trans. Magn. 36 3495 doi: 10.1109/20.908872
[62]	Mircea D I and Clinton T W 2007 Appl. Phys. Lett. 90 142504 doi: 10.1063/1.2719241
[21]	Phuoc N N and Ong C K 2013 Adv. Mater. 25980
[63]	Knorr T G and Hoffman R W 1959 Phys. Rev. 113 1039 doi: 10.1103/PhysRev.113.1039
[22]	Bailleul M 2013 Appl. Phys. Lett. 103 192405 doi: 10.1063/1.4829367
[64]	Chai G, Phuoc N N and Ong C K 2014 Appl. Phys. Express 7 063001 doi: 10.7567/APEX.7.063001
[23]	Acher O, Vermeulen J L, Jacquart P M, Fontaine J M and Baclet P 1994 J. Magn. Magn. Mater. 136 269 doi: 10.1016/0304-8853(94)00323-8
[65]	Clinton T W, Benatmane N, Hohlfeld J and Girt E 2008 J. Appl. Phys. 103 07F546
[24]	Wang Y, Bettermann A D and van der Weide D W 2007 J. Vac. Sci. Technol. B 25813
[66]	Wang Z, Kelly M A, Shen Z X, Shao L, Chu W K and Edwards H 2005 Appl. Phys. Lett. 86 153118 doi: 10.1063/1.1891296
[25]	Queffelec P, Le Floc'h M and Gelin P 1998 ITIEEE Trans. Instrum. Meas. 47956
[67]	Wang Z, Fan X, Zhao X, Chai G and Xue D 2015 J. Alloys Compd. 628 236 doi: 10.1016/j.jallcom.2014.12.168
[26]	Lai K, Ji M B, Leindecker N, Kelly M A and Shen Z X 2007 Rev. Sci. Instrum. 78 063702 doi: 10.1063/1.2746768
[68]	Gardner D S et al 2008 J. Appl. Phys. 103 07E927
[27]	Liu Y, Cheng L, Tan C Y, Liu H J and Ong C K 2005 Rev. Sci. Instrum. 76 063911 doi: 10.1063/1.1935429
[69]	Ding Y, Klemmer T J and Crawford T M 2004 J. Appl. Phys. 96 2969 doi: 10.1063/1.1774242
[28]	van Heteren J G, James T W and Bourne L C 2010 Magnetic Resonance in Medicine Official Journal of the Society of Magnetic Resonance in Medicine 32396
[70]	Kos A B, Silva T J and Kabos P 2002 Rev. Sci. Instrum. 73 3563 doi: 10.1063/1.1505657
[29]	Li X L, Li C Y and Chai G Z 2017 Meas. Sci. Technol. 28 115104 doi: 10.1088/1361-6501/aa85b3
[71]	Spinelli A, Bryant B, Delgado F, Fernandez-Rossier J and Otte A F 2014 Nat. Mater. 13 782 doi: 10.1038/nmat4018
[30]	Chi X, Yi H, Zuo W, Qiao L, Wang T and Li F 2011 J. Phys. D:Appl. Phys. 44 295001 doi: 10.1088/0022-3727/44/29/295001
[72]	Yamaguchi M, Yabukami S and Arai K I 1996 IEEE Trans. Magn. 32 4941 doi: 10.1109/20.539295
[31]	Dubuget V, Thiaville A, Duverger F, Dubourg S, Acher O and Adenot-Engelvin A L 2009 Phys. Rev. B 80 134412 doi: 10.1103/PhysRevB.80.134412
[73]	Kimura T, Yabukami S, Ozawa T, Miyazawa Y, Kenju H and Shimada Y 2014 J. Magn. Soc. Jpn. 38 87 doi: 10.3379/msjmag.1404R003
[32]	Acher O, Jacquart P M, Fontaine J M, Baclet P and Perrin G 1994 IEEE Trans. Magn. 30 4533 doi: 10.1109/20.334139
[74]	Gregory A, Hao L, Klein N, Gallop J, Mattevi C, Shaforost O, Lees K and Clarke B 2014 Physica E 56 431 doi: 10.1016/j.physe.2012.10.006
[33]	Adenot A L, Acher O, Pain D, Duverger F, Malliavin M J, Damiani D and Taffary T 2000 J. Appl. Phys. 87 5965 doi: 10.1063/1.372581
[75]	Dubourg S, Queste S and Acher O 2005 J. Appl. Phys. 97 10F903
[34]	Kawazu T, Yamaguchi M and Arai K I 1994 IEEE Trans. Magn. 30 4641 doi: 10.1109/20.334176
[76]	Counil G, Kim J V, Devolder T, Crozat P, Chappert C and Cebollada A 2005 J. Appl. Phys. 98 023901 doi: 10.1063/1.1968442
[35]	Yamaguchi M, Yabukami S and Arai K I 1995 IEEE Trans. Magn. 31 3173 doi: 10.1109/20.490318
[77]	Counil G, Kim J-V, Devolder T, Crozat P, Chappert C and Cebollada A 2005 J. Appl. Phys. 98023901
[36]	Yabukami S, Kikuchi K, Yamaguchi M and Arai K I 1997 IEEE Trans. Magn. 33 4044 doi: 10.1109/20.619657
[78]	Ledieu M, Schoenstein F, Gallou J H L, Valls O, Queste S, Duverger F and Acher O 2003 J. Appl. Phys. 93 7202 doi: 10.1063/1.1555902
[37]	Counil G, Kim J V, Devolder T, Crozat P, Chappert C and Cebollada A 2005 J. Appl. Phys. 98 023901 doi: 10.1063/1.1968442
[79]	Pain D, Ledieu M, Acher O, Adenot A L and Duverger F 1999 J. Appl. Phys. 85 5151 doi: 10.1063/1.369107
[38]	Gloanec M, Dubourg S, Acher O, Duverger F, Plessis D and BonneauBrault A 2012 Phys. Rev. B 85 117
[80]	Kimura T, Yabukami S, Ozawa T, Miyazawa Y, Kenju H and Shimada Y 2014 J. Magn. Soc. Jpn. 38 87 doi: 10.3379/msjmag.1404R003
[39]	Suzuki E, Furukawa H and Arai K I 2007 IEEE Trans. Magn. 43 3359 doi: 10.1109/TMAG.2007.900038
[81]	Yamaguchi M, Acher O, Miyazawa Y, Arai K I and Ledieu M 2002 J. Magn. Magn. Mater. 242 970
[40]	Yabukami S 2009 J. Appl. Phys. 105 07E719
[82]	Kittel C 1948 Phys. Rev. 73 155 doi: 10.1103/PhysRev.73.155
[41]	Moraitakis E, Kompotiatis L, Pissas M and Niarchos D 2000 J. Magn. Magn. Mater. 222 168 doi: 10.1016/S0304-8853(00)00560-6
[83]	Nistor C, Sun K, Wang Z, Wu M, Mathieu C and Hadley M 2009 Appl. Phys. Lett. 95 012504 doi: 10.1063/1.3175721
[42]	Sheng S, Wang P, Zhang X Y and Ong C K 2009 J. Phys. D:Appl. Phys. 42 015501 doi: 10.1088/0022-3727/42/1/015501
[84]	Soh W T, Peng B, Chai G and Ong C K 2014 Rev. Sci. Instrum. 85 026109 doi: 10.1063/1.4865122
[43]	Kostylev M 2016 J. Appl. Phys. 119103903
[85]	Wang Z, Sun K, Tong W, Wu M, Liu M and Sun N X 2010 Phys. Rev. B 81 064402 doi: 10.1103/PhysRevB.81.064402
[44]	Nicolson A M and Ross G F 1968 IEEE Trans. Instrum. Meas. 17 395 doi: 10.1109/TIM.1968.4313741
[45]	Hammerstad E D 1975 Eur. Microwave Conf. Proc. 268
[46]	Wheeler H A 1977 IEEE Trans. Microwave Theory Tech. 25 631 doi: 10.1109/TMTT.1977.1129179
[47]	Grimes C A and Prodan J V 1993 J. Appl. Phys. 73 6989 doi: 10.1063/1.352407
[48]	Weir W W 1974 Proc. IEEE 62 33 doi: 10.1109/PROC.1974.9382
[49]	Cagan V and Guyot M 1984 IEEE Trans. Magn. 20 1732 doi: 10.1109/TMAG.1984.1063470
[50]	Grimes C A, Trouilloud P L and Walser R M 1988 IEEE Trans. Magn. 24 603 doi: 10.1109/20.43991
[51]	Bekker V, Seemann K and Leiste H 2004 J. Magn. Magn. Mater. 270 327 doi: 10.1016/j.jmmm.2003.08.033
[52]	Jiang J, Du G, Yao Y, Liu C, Yuan L, Bie S, Zhang X and He H 2008 J. Magn. Magn. Mater. 320 750 doi: 10.1016/j.jmmm.2007.08.012
[53]	Wu Y, Tang Z, Xu Y, Zhang B and He X 2010 IEEE Trans. Magn. 46 886 doi: 10.1109/TMAG.2009.2030886
[54]	Steinhauer D E, Vlahacos C P, Wellstood F C, Anlage S M, Canedy C, Ramesh R, Stanishevsky A and Melngailis J 2000 Rev. Sci. Instrum. 71 2751 doi: 10.1063/1.1150687
[55]	Gilbert T L 2004 IEEE Trans. Magn. 40 3443 doi: 10.1109/TMAG.2004.836740
[56]	Kalarickal S S, Krivosik P, Wu M, Patton C E, chneider M L, Kabos P, Silva T J and Nibarger J P 2006 J. Appl. Phys. 99093909
[57]	Bilzer C, Devolder T, Crozat P and Chappert C 2008 IEEE Trans. Magn. 44 3265 doi: 10.1109/TMAG.2008.2004379
[58]	Beguhn S, Zhou Z, R, S, Yang X, Lou J and Sun N X 2012 J. Appl. Phys. 111 07A503
[59]	Dutra R, Gonzalez-Chavez D E, Marcondes T L, Andrade A M H D, Geshev J and Sommer R L 2013 J. Magn. Magn. Mater. 346 1 doi: 10.1016/j.jmmm.2013.06.040
[60]	He S and Panagopoulos C 2016 Rev. Sci. Instrum. 87 043110 doi: 10.1063/1.4946789
[61]	Lee S C, Vlahacos C P, Feenstra B J, Schwartz A, Steinhauer D E, Wellstood F C and Anlage S M 2000 Appl. Phys. Lett. 77 4404 doi: 10.1063/1.1332978
[62]	Mircea D I and Clinton T W 2007 Appl. Phys. Lett. 90 142504 doi: 10.1063/1.2719241
[63]	Knorr T G and Hoffman R W 1959 Phys. Rev. 113 1039 doi: 10.1103/PhysRev.113.1039
[64]	Chai G, Phuoc N N and Ong C K 2014 Appl. Phys. Express 7 063001 doi: 10.7567/APEX.7.063001
[65]	Clinton T W, Benatmane N, Hohlfeld J and Girt E 2008 J. Appl. Phys. 103 07F546
[66]	Wang Z, Kelly M A, Shen Z X, Shao L, Chu W K and Edwards H 2005 Appl. Phys. Lett. 86 153118 doi: 10.1063/1.1891296
[67]	Wang Z, Fan X, Zhao X, Chai G and Xue D 2015 J. Alloys Compd. 628 236 doi: 10.1016/j.jallcom.2014.12.168
[68]	Gardner D S et al 2008 J. Appl. Phys. 103 07E927
[69]	Ding Y, Klemmer T J and Crawford T M 2004 J. Appl. Phys. 96 2969 doi: 10.1063/1.1774242
[70]	Kos A B, Silva T J and Kabos P 2002 Rev. Sci. Instrum. 73 3563 doi: 10.1063/1.1505657
[71]	Spinelli A, Bryant B, Delgado F, Fernandez-Rossier J and Otte A F 2014 Nat. Mater. 13 782 doi: 10.1038/nmat4018
[72]	Yamaguchi M, Yabukami S and Arai K I 1996 IEEE Trans. Magn. 32 4941 doi: 10.1109/20.539295
[73]	Kimura T, Yabukami S, Ozawa T, Miyazawa Y, Kenju H and Shimada Y 2014 J. Magn. Soc. Jpn. 38 87 doi: 10.3379/msjmag.1404R003
[74]	Gregory A, Hao L, Klein N, Gallop J, Mattevi C, Shaforost O, Lees K and Clarke B 2014 Physica E 56 431 doi: 10.1016/j.physe.2012.10.006
[75]	Dubourg S, Queste S and Acher O 2005 J. Appl. Phys. 97 10F903
[76]	Counil G, Kim J V, Devolder T, Crozat P, Chappert C and Cebollada A 2005 J. Appl. Phys. 98 023901 doi: 10.1063/1.1968442
[77]	Counil G, Kim J-V, Devolder T, Crozat P, Chappert C and Cebollada A 2005 J. Appl. Phys. 98023901
[78]	Ledieu M, Schoenstein F, Gallou J H L, Valls O, Queste S, Duverger F and Acher O 2003 J. Appl. Phys. 93 7202 doi: 10.1063/1.1555902
[79]	Pain D, Ledieu M, Acher O, Adenot A L and Duverger F 1999 J. Appl. Phys. 85 5151 doi: 10.1063/1.369107
[80]	Kimura T, Yabukami S, Ozawa T, Miyazawa Y, Kenju H and Shimada Y 2014 J. Magn. Soc. Jpn. 38 87 doi: 10.3379/msjmag.1404R003
[81]	Yamaguchi M, Acher O, Miyazawa Y, Arai K I and Ledieu M 2002 J. Magn. Magn. Mater. 242 970
[82]	Kittel C 1948 Phys. Rev. 73 155 doi: 10.1103/PhysRev.73.155
[83]	Nistor C, Sun K, Wang Z, Wu M, Mathieu C and Hadley M 2009 Appl. Phys. Lett. 95 012504 doi: 10.1063/1.3175721
[84]	Soh W T, Peng B, Chai G and Ong C K 2014 Rev. Sci. Instrum. 85 026109 doi: 10.1063/1.4865122
[85]	Wang Z, Sun K, Tong W, Wu M, Liu M and Sun N X 2010 Phys. Rev. B 81 064402 doi: 10.1103/PhysRevB.81.064402

Techniques of microwave permeability characterization for thin films

Techniques of microwave permeability characterization for thin films

RichHTML

PDF (PC)

赞

可视化

摘要/Abstract

引用本文

使用本文

参考文献 85

相关文章 1

Metrics

本文评价

推荐阅读 0