中国物理B ›› 2018, Vol. 27 ›› Issue (12): 124702-124702.doi: 10.1088/1674-1056/27/12/124702
• ELECTROMAGNETISM, OPTICS, ACOUSTICS, HEAT TRANSFER, CLASSICAL MECHANICS, AND FLUID DYNAMICS • 上一篇 下一篇
Numerical simulation of metal evaporation based on the kinetic model equation and the direct simulation Monte Carlo method
Xiaoyong Lu(卢肖勇), Xiaozhang Zhang(张小章), Zhizhong Zhang(张志忠)
- 1 Department of Engineering Physics, Tsinghua University, Beijing 100084, China;
2 Research Institute of Physics and Chemical Engineering of Nuclear Industry, Tianjin 300180, China
Numerical simulation of metal evaporation based on the kinetic model equation and the direct simulation Monte Carlo method
Xiaoyong Lu(卢肖勇)1,2, Xiaozhang Zhang(张小章)1, Zhizhong Zhang(张志忠)2
- 1 Department of Engineering Physics, Tsinghua University, Beijing 100084, China;
2 Research Institute of Physics and Chemical Engineering of Nuclear Industry, Tianjin 300180, China
摘要：
Metal evaporation on the basis of the kinetic model equations (BGK and S-model) and the direct simulation Monte Carlo (DSMC) method was investigated computationally under the circumstances of collimators existing or not. Numerical data of distributions of number density, bulk velocity and temperature were reported over a wide range of evaporation rate. It was shown that these results reached a good agreement for the case of small evaporation rate, while the deviations became increasingly obvious with the increase of evaporation rate, especially when the collimators existed. Moreover, the deposition thickness over substrate obtained from the kinetic model equations were inaccurate even though the evaporation rate was small. All of the comparisons showed the reliability of the kinetic model equations, which require less computational cost at small evaporation rate and simple structure.
中图分类号: (Rarefied gas dynamics)
- 47.45.-n