Spectral and ion emission features of laser-produced Sn and SnO2 plasmas

doi:10.1088/1674-1056/25/3/035202

中国物理B ›› 2016, Vol. 25 ›› Issue (3): 35202-035202.doi: 10.1088/1674-1056/25/3/035202

• PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES • 上一篇下一篇

Spectral and ion emission features of laser-produced Sn and SnO₂ plasmas

Hui Lan(兰慧), Xin-Bing Wang(王新兵), Du-Luo Zuo(左都罗)

1. School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China;
2. School of Physics and Information Engineering, Jianghan University, Wuhan 430056, China;
3. Wuhan National Laboratory for Optoelectronics (WNLO), Wuhan 430074, China

收稿日期:2015-07-13 修回日期:2015-11-06 出版日期:2016-03-05 发布日期:2016-03-05
通讯作者: Xin-Bing Wang E-mail:xbwang@hust.edu.cn
基金资助:
Project supported by the National Natural Science Foundation of China (Grant No. 11304235) and the Director Fund of WNLO, China.

Spectral and ion emission features of laser-produced Sn and SnO₂ plasmas

Hui Lan(兰慧)^1,2, Xin-Bing Wang(王新兵)³, Du-Luo Zuo(左都罗)³

1. School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China;
2. School of Physics and Information Engineering, Jianghan University, Wuhan 430056, China;
3. Wuhan National Laboratory for Optoelectronics (WNLO), Wuhan 430074, China

Received:2015-07-13 Revised:2015-11-06 Online:2016-03-05 Published:2016-03-05
Contact: Xin-Bing Wang E-mail:xbwang@hust.edu.cn
Supported by:
Project supported by the National Natural Science Foundation of China (Grant No. 11304235) and the Director Fund of WNLO, China.

摘要/Abstract

摘要： We have made a detailed comparison of the atomic and ionic debris, as well as the emission features of Sn and SnO₂ plasmas under identical experimental conditions. Planar slabs of pure metal Sn and ceramic SnO₂ are irradiated with 1.06 μm, 8 ns Nd:YAG laser pulses. Fast photography employing an intensified charge coupled device (ICCD), optical emission spectroscopy (OES), and optical time of flight emission spectroscopy are used as diagnostic tools. Our results show that the Sn plasma provides a higher extreme ultraviolet (EUV) conversion efficiency (CE) than the SnO₂ plasma. However, the kinetic energies of Sn ions are relatively low compared with those of SnO₂. OES studies show that the Sn plasma parameters (electron temperature and density) are lower compared to those of the SnO₂ plasma. Furthermore, we also give the effects of the vacuum degree and the laser pulse energy on the plasma parameters.

关键词: laser-produced plasma, Nd:YAG laser, ion emission, extreme ultraviolet emission

Abstract: We have made a detailed comparison of the atomic and ionic debris, as well as the emission features of Sn and SnO₂ plasmas under identical experimental conditions. Planar slabs of pure metal Sn and ceramic SnO₂ are irradiated with 1.06 μm, 8 ns Nd:YAG laser pulses. Fast photography employing an intensified charge coupled device (ICCD), optical emission spectroscopy (OES), and optical time of flight emission spectroscopy are used as diagnostic tools. Our results show that the Sn plasma provides a higher extreme ultraviolet (EUV) conversion efficiency (CE) than the SnO₂ plasma. However, the kinetic energies of Sn ions are relatively low compared with those of SnO₂. OES studies show that the Sn plasma parameters (electron temperature and density) are lower compared to those of the SnO₂ plasma. Furthermore, we also give the effects of the vacuum degree and the laser pulse energy on the plasma parameters.

Key words: laser-produced plasma, Nd:YAG laser, ion emission, extreme ultraviolet emission

中图分类号: (Laser-plasma interactions)

52.38.-r

52.38.Mf (Laser ablation) 52.70.-m (Plasma diagnostic techniques and instrumentation) 52.70.La (X-ray and γ-ray measurements)

兰慧, 王新兵, 左都罗. Spectral and ion emission features of laser-produced Sn and SnO₂ plasmas[J]. 中国物理B, 2016, 25(3): 35202-035202.

Hui Lan(兰慧), Xin-Bing Wang(王新兵), Du-Luo Zuo(左都罗). Spectral and ion emission features of laser-produced Sn and SnO₂ plasmas[J]. Chin. Phys. B, 2016, 25(3): 35202-035202.

参考文献 23

[1]	Bakshi V 2006 EUV Sources for Lithography (NewYork: SPIE Press)
[2]	Dou Y P, Sun C K and Liu C Z 2014 Chin. Phys. B 23 075202
[3]	Liu T H, Hao Z Q, Gao X, Liu Z H and Lin J Q 2014 Chin. Phys. B 23 085203
[4]	Chen H, Lan H, Chen Z Q, Liu L N, Wu T, Zuo D L, Lu P X and Wang X B 2015 Acta Phys. Sin. 64 075202 (in Chinese)
[5]	Wu T, Wang X B and Wang S Y 2012 J. Appl. Phys. 111 063304
[6]	Liu Y F, Zhang L S and He W L 2015 Acta Phys. Sin. 64 045202 (in Chinese)
[7]	Tanaka H, Akinaga K, Takahashi A and Okada T 2004 Proc. SPIE 5662 313
[8]	Bowering N, Martins M, Partlo W N and Fomenkov I V 2004 J. Appl. Phys. 95 16
[9]	Coons R W, Campos D, Crank M, Harilal S S and Hassanein A 2010 Proc. SPIE 7636 763636
[10]	Nagano A, Inoue T, Nica P E, Amano S, Miyamoto S and Mochizuki T 2007 Appl. Phys. Lett. 90 151502
[11]	Ueno Y, Ariga T, Soumagne G, Higashiguchi T, Kubodera S, Pogorelsky I, Pavlishin I, Stolyarov D, Babzien M, Kusche K and Yakimenko V 2007 Appl. Phys. Lett. 90 191503
[12]	George S A, Silfvast W T, Takenoshita K, Bernath R T, Koay C S, Shimkaveg G and Richardson M C 2007 Opt. Lett. 32 997
[13]	Choi H W, Daido H, Yamagami S, Nagai K, Norimatsu T, Takabe H, Suzuki M, Nakayama T and Matsui T 2002 J. Opt. Soc. Am. B 17 1616
[14]	Hayden P, Sheridan P, O'Sullivan G, Dunne P A, Gaynor L and Murphy N 2005 Proc. SPIE 5826154
[15]	Xin J G 2013 The Journal of Macro Trends in Technology and Innovation 1 1
[16]	Tao Y, Sohbatzadeh F, Nishimura H, Matsui R, Hibino T, Okuno T, Fujioka S, Nagai K, Norimatsu T, Nishihara K, Miyanaga N, Izawa Y, Sunahara A and Kawamura T 2004 Appl. Phys. Lett. 85 1919
[17]	O'Sullivan G and Faulkner R 1994 Optical Engineering 33 3978
[18]	Cai Y Wang W T, Yang M, Liu J S Lu P X, Li R X and Xu Z Z 2008 Acta Phys. Sin 57 5100 (in Chinese)
[19]	Takahashi A, Nakamura D, Tamaru K, Akiyama T and Okada T 2008 Appl. Phys. B 92 73
[20]	Amano S, Inoue T and Harada T 2011 Appl. Opt. 52 16
[21]	Verbraak H, Küpper F, Jonkers J and Bergmann K 2010 J. Appl. Phys. 108 093304
[22]	http://physics.nist.gov/PhysRefData/Handbook/Tables/tintable4.htm
[23]	Griem H R1963 Phys. Rev. 131 1170

Spectral and ion emission features of laser-produced Sn and SnO₂ plasmas

Spectral and ion emission features of laser-produced Sn and SnO₂ plasmas

RichHTML

PDF (PC)

赞

可视化

摘要/Abstract

引用本文

使用本文

参考文献 23

相关文章 15

Metrics

本文评价

推荐阅读 0

[1]	Zexin Song(宋泽鑫), Qi Bian(卞奇), Yu Shen(申玉), Keling Gong(龚柯菱), Nan Zong(宗楠), Qingshuang Zong(宗庆霜), Yong Bo(薄勇), and Qinjun Peng(彭钦军). Pump pulse characteristics of quasi-continuous-wave diode-side-pumped Nd:YAG laser[J]. 中国物理B, 2022, 31(5): 54208-054208.
[2]	Tushagu Abudouwufu(吐沙姑·阿不都吾甫), Xiangyu Zhang (张翔宇), Wenbin Zuo (左文彬), Jinbao Luo(罗进宝), Yueqiang Lan(兰越强), Canxin Tian (田灿鑫), Changwei Zou(邹长伟), Alexander Tolstoguzov, and Dejun Fu(付德君). Copper ion beam emission in solid electrolyte Rb₄Cu₁₆I_6.5Cl_13.5[J]. 中国物理B, 2022, 31(4): 40704-040704.
[3]	Jin-Fu Liang(梁金福), De-Feng Xiong(熊德凤), Yu An(安宇), and Wei-Zhong Chen(陈伟中). Computational simulation of ionization processes in single-bubble and multi-bubble sonoluminescence[J]. 中国物理B, 2022, 31(11): 117802-117802.
[4]	Yu Shen(申玉), Yong Bo(薄勇), Nan Zong(宗楠), Shenjin Zhang(张申金), Qinjun Peng(彭钦军), and Zuyan Xu(许祖彦). A 37 mJ, 100 Hz, high energy single frequency oscillator[J]. 中国物理B, 2021, 30(8): 84208-084208.
[5]	Mohammedelnazier Bakhiet, 苏茂根, 曹世权, 敏琦, 孙对兄, 何思奇, 吴磊, 董晨钟. Analysis of extreme ultraviolet spectra of laser-produced Cd plasmas[J]. 中国物理B, 2020, 29(7): 75203-075203.
[6]	吴磊, 苏茂根, 敏琦, 曹世权, 何思奇, 孙对兄, 董晨钟. Analysis of extreme ultraviolet spectral profiles of laser-produced Cr plasmas[J]. 中国物理B, 2019, 28(7): 75201-075201.
[7]	戴殊韬, 吴鸿春, 史斐, 邓晶, 葛燕, 翁文, 林文雄. Development of an injection-seeded single-frequency laser by using the phase modulated technique[J]. 中国物理B, 2018, 27(5): 54212-054212.
[8]	宋海英, 李辉, 张艳杰, 谷鹏, 刘海云, 李维, 刘勋, 刘世炳. Time-resolved spectroscopy for 5s'⁴D_7/2 state transitions undergoing electron-ion recombination in femtosecond laser-produced copper plasma[J]. 中国物理B, 2017, 26(12): 124208-124208.
[9]	A Maleki, M Kavosh Tehrani, H Saghafifar, M H Moghtader Dindarlu. Experimental study of electro-optical Q-switched pulsed Nd:YAG laser[J]. 中国物理B, 2016, 25(3): 34206-034206.
[10]	Seyed Ebrahim Pourmand, Ghasem Rezaei. Effects of 946-nm thermal shift and broadening on Nd³⁺:YAG laser performance[J]. 中国物理B, 2015, 24(12): 124206-124206.
[11]	王鹏远, 谢仕永, 薄勇, 王保山, 左军卫, 王志超, 申玉, 张丰丰, 魏凯, 晋凯, 徐一汀, 许家林, 彭钦军, 张景园, 雷文强, 崔大复, 张雨东, 许祖彦. 33 W quasi-continuous-wave narrow-band sodium D_2a laser by sum-frequency generation in LBO[J]. 中国物理B, 2014, 23(9): 94208-094208.
[12]	曾鑫, 方棋洪, 刘又文, P. H. Wen. Screw dislocations interacting with two asymmetrical interfacial cracks emanating from an elliptical hole[J]. Chin. Phys. B, 2013, 22(1): 14601-014601.
[13]	Seyed Ebrahim Pourmand, Noriah Bidin, Hazri Bakhtiar. Effects of temperature and input energy on quasi-three-level emission cross section of Nd³⁺:YAG pumped by flashlamp[J]. 中国物理B, 2012, 21(9): 94214-094214.
[14]	李成仁, 李淑凤, 董斌, 孙景昌, 卜晓峰, 范旭楠. Intense up-conversion emissions of Yb³⁺/Dy³⁺ co-doped Al₂O₃ nanopowders prepared by non-aqueous sol–gel method[J]. 中国物理B, 2012, 21(9): 97803-097803.
[15]	H. Nili-Ahmadabadi, A.R. Khorsandi. Surface second-harmonic generation based on periodically poled LiNbO₃ nonlinear optical crystal[J]. 中国物理B, 2011, 20(5): 54205-054205.