中国物理B ›› 2014, Vol. 23 ›› Issue (11): 117801-117801.doi: 10.1088/1674-1056/23/11/117801

• CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES • 上一篇    下一篇

Homogeneity analysis of sculptured thin films deposited in symmetric style through glancing angle deposition technique

王斌a b, 齐红基a, 孙卫a b, 何骏a b, 赵娇玲a b, 王虎a b, 侯永强a b   

  1. a Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China;
    b University of Chinese Academy of Sciences, Beijing 100049, China
  • 收稿日期:2014-03-10 修回日期:2014-05-11 出版日期:2014-11-15 发布日期:2014-11-15
  • 基金资助:

    Project supported by the National Natural Science Foundation of China (Grant No. 61205211).

Homogeneity analysis of sculptured thin films deposited in symmetric style through glancing angle deposition technique

Wang Bin (王斌)a b, Qi Hong-Ji (齐红基)a, Sun Wei (孙卫)a b, He Jun (何骏)a b, Zhao Jiao-Ling (赵娇玲)a b, Wang Hu (王虎)a b, Hou Yong-Qiang (侯永强)a b   

  1. a Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China;
    b University of Chinese Academy of Sciences, Beijing 100049, China
  • Received:2014-03-10 Revised:2014-05-11 Online:2014-11-15 Published:2014-11-15
  • Contact: Qi Hong-Ji E-mail:qhj@mail.siom.ac.cn
  • Supported by:

    Project supported by the National Natural Science Foundation of China (Grant No. 61205211).

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摘要：

The symmetric deposition technique is often used to improve the uniformity of sculptured thin film (STF). In this paper, optical properties of STF with the columnar angles ± β are analyzed theoretically, based on the characteristic matrix method for extraordinary waves. Then, the transmittances of uniformity monolayer and bilayer STF in symmetrical style are calculated to show the effect of the bilayer structure on the optical properties of STF. The inhomogeneity of STF is involved in analyzing the differences in transmittance and phase retardation between monolayer and bilayer STF deposited in symmetric style. The results show that optical homogeneity of STF can be improved by depositing in symmetric style at the normal incidence, but it is not the same case as the oblique incidence.

关键词: birefringence, dielectric thin films, optical properties

Abstract:

The symmetric deposition technique is often used to improve the uniformity of sculptured thin film (STF). In this paper, optical properties of STF with the columnar angles ± β are analyzed theoretically, based on the characteristic matrix method for extraordinary waves. Then, the transmittances of uniformity monolayer and bilayer STF in symmetrical style are calculated to show the effect of the bilayer structure on the optical properties of STF. The inhomogeneity of STF is involved in analyzing the differences in transmittance and phase retardation between monolayer and bilayer STF deposited in symmetric style. The results show that optical homogeneity of STF can be improved by depositing in symmetric style at the normal incidence, but it is not the same case as the oblique incidence.

Key words: birefringence, dielectric thin films, optical properties

中图分类号:  (Birefringence)

  • 78.20.Fm
78.20.Ci (Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity)) 42.25.Ja (Polarization)