Silicon micro-hemispheres with periodic nanoscale rings produced by the laser ablation of single crystalline silicon

doi:10.1088/1674-1056/22/10/106101

中国物理B ›› 2013, Vol. 22 ›› Issue (10): 106101-106101.doi: 10.1088/1674-1056/22/10/106101

• CONDENSED MATTER: STRUCTURAL, MECHANICAL, AND THERMAL PROPERTIES • 上一篇下一篇

Silicon micro-hemispheres with periodic nanoscale rings produced by the laser ablation of single crystalline silicon

陈明^a, 李爽^{a b}, 崔清强^a, 刘向东^{a c}

a School of Physics, Shandong University, Jinan 250100, China;
b School of Computer, Shandong Xiehe University, Jinan 250100, China;
c State Key Laboratory of Crystal Materials, Shandong University, Jinan 250100, China

收稿日期:2013-03-04 修回日期:2013-06-19 出版日期:2013-08-30 发布日期:2013-08-30
基金资助:
Project supported by the National Natural Science Foundation of China (Grant Nos. 11105085 and 11075097), the Excellent Youth and Middle Age Scientists Fund of Shandong Province, China (Grant No. BS2012CL024), and the Project of Higher Educational Science and Technology Program of Shandong Province, China (Grant No. J12LA51).

Silicon micro-hemispheres with periodic nanoscale rings produced by the laser ablation of single crystalline silicon

Chen Ming (陈明)^a, Li Shuang (李爽)^{a b}, Cui Qing-Qiang (崔清强)^a, Liu Xiang-Dong (刘向东)^{a c}

a School of Physics, Shandong University, Jinan 250100, China;
b School of Computer, Shandong Xiehe University, Jinan 250100, China;
c State Key Laboratory of Crystal Materials, Shandong University, Jinan 250100, China

Received:2013-03-04 Revised:2013-06-19 Online:2013-08-30 Published:2013-08-30
Contact: Chen Ming, Liu Xiang-Dong E-mail:chenming@sdu.edu.cn;xdliu@sdu.edu.cn
Supported by:
Project supported by the National Natural Science Foundation of China (Grant Nos. 11105085 and 11075097), the Excellent Youth and Middle Age Scientists Fund of Shandong Province, China (Grant No. BS2012CL024), and the Project of Higher Educational Science and Technology Program of Shandong Province, China (Grant No. J12LA51).

摘要/Abstract

摘要： We describe the fabrication of silicon micro-hemispheres by adopting the conventional laser ablation of single crystalline silicon in the vacuum condition without using any catalysts or additives. The highly oriented structures of silicon micro-hemispheres exhibit many periodic nanoscale rings along their outer surfaces. We consider that the self-organized growth of silicon micro-structures is highly dependent on the laser intensity and background air medium. The difference between these surface modifications is attributed to the amount of laser energy deposited in the silicon material and the consequent cooling velocity.

关键词: silicon micro-hemispheres, pulsed laser ablation

Abstract: We describe the fabrication of silicon micro-hemispheres by adopting the conventional laser ablation of single crystalline silicon in the vacuum condition without using any catalysts or additives. The highly oriented structures of silicon micro-hemispheres exhibit many periodic nanoscale rings along their outer surfaces. We consider that the self-organized growth of silicon micro-structures is highly dependent on the laser intensity and background air medium. The difference between these surface modifications is attributed to the amount of laser energy deposited in the silicon material and the consequent cooling velocity.

Key words: silicon micro-hemispheres, pulsed laser ablation

中图分类号: (Structure of clusters (e.g., metcars; not fragments of crystals; free or loosely aggregated or loosely attached to a substrate))

61.46.Bc

52.38.Mf (Laser ablation)

陈明, 李爽, 崔清强, 刘向东. Silicon micro-hemispheres with periodic nanoscale rings produced by the laser ablation of single crystalline silicon[J]. 中国物理B, 2013, 22(10): 106101-106101.

Chen Ming (陈明), Li Shuang (李爽), Cui Qing-Qiang (崔清强), Liu Xiang-Dong (刘向东). Silicon micro-hemispheres with periodic nanoscale rings produced by the laser ablation of single crystalline silicon[J]. Chin. Phys. B, 2013, 22(10): 106101-106101.

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Silicon micro-hemispheres with periodic nanoscale rings produced by the laser ablation of single crystalline silicon

Silicon micro-hemispheres with periodic nanoscale rings produced by the laser ablation of single crystalline silicon

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