中国物理B ›› 2010, Vol. 19 ›› Issue (8): 87701-087701.doi: 10.1088/1674-1056/19/8/087701
张超1, 江小宁2, 马廷锋3, 冯冠平3
Ma Ting-Feng(马廷锋)a), Zhang Chao(张超)b)† , Feng Guan-Ping(冯冠平)a)b), and Jiang Xiao-Ning(江小宁)c)
摘要: In this work, bulk acoustic wave propagation properties of langasite single crystal excited by lateral electric field have been investigated. Three important crystal cuts have been identified for different operational modes of lateral field excitation (LFE) on langasite substrate, namely the (yxl)65o (pure-LFE mode), (yxl)45o (quasi-LFE mode), and (yxl)0o (pseudo-LFE mode). Devices on langasite substrate with the above cuts were fabricated and tested, and the experimental results agree well with the theoretical analysis. It is found that a pure thickness shear mode exists in the (yxl)65o langasite LFE device with the bare side facing liquid, and no spurious mode is found due to its moderately large piezoelectric coupling factor. In addition, (yxl)0o langasite LFE device is also found suitable for liquid phase sensing applications.
中图分类号: (Acoustical properties of solids)