Study on tapered crossed subwavelength gratings by Fourier modal method

doi:10.1088/1674-1056/19/10/104101

中国物理B ›› 2010, Vol. 19 ›› Issue (10): 104101-104101.doi: 10.1088/1674-1056/19/10/104101

Study on tapered crossed subwavelength gratings by Fourier modal method

陈熙¹, 王青¹, 张冶金¹, 陈良惠¹, 钟源²

(1)Nano-Optoelectronics Laboratory, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; (2)National Institute of Metrology, Beijing 100013, China

收稿日期:2009-12-17 修回日期:2010-05-19 出版日期:2010-10-15 发布日期:2010-10-15
基金资助:
Project supported by the National Natural Science Foundation of China (Grant No. 60636030).

Study on tapered crossed subwavelength gratings by Fourier modal method

Chen Xi(陈熙)^a)^†, Zhong Yuan(钟源)^b), Wang Qing(王青)^a), Zhang Ye-Jin(张冶金)^a), and Chen Liang-Hui(陈良惠)^a)

^a Nano-Optoelectronics Laboratory, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; ^b National Institute of Metrology, Beijing 100013, China

Received:2009-12-17 Revised:2010-05-19 Online:2010-10-15 Published:2010-10-15
Supported by:
Project supported by the National Natural Science Foundation of China (Grant No. 60636030).

摘要/Abstract

摘要： Fourier modal method incorporating staircase approximation is used to study tapered crossed subwavelength gratings in this paper. Three intuitive formulations of eigenvalue functions originating from the prototype are presented, and their convergences are compared through numerical calculation. One of them is found to be suitable in modeling the diffraction efficiency of the circular tapered crossed subwavelength gratings without high absorption, and staircase approximation is further proven valid for non-highly-absorptive tapered gratings. This approach is used to simulate the ``moth-eye'' antireflection surface on silicon, and the numerical result agrees well with the experimental one.

Abstract: Fourier modal method incorporating staircase approximation is used to study tapered crossed subwavelength gratings in this paper. Three intuitive formulations of eigenvalue functions originating from the prototype are presented, and their convergences are compared through numerical calculation. One of them is found to be suitable in modeling the diffraction efficiency of the circular tapered crossed subwavelength gratings without high absorption, and staircase approximation is further proven valid for non-highly-absorptive tapered gratings. This approach is used to simulate the ''moth-eye'' antireflection surface on silicon, and the numerical result agrees well with the experimental one.

Key words: tapered crossed subwavelength gratings, Fourier modal method, staircase approximation, eigenvalue functions

中图分类号: (Linear algebra)

02.10.Ud

42.30.Kq (Fourier optics) 42.79.Dj (Gratings)

陈熙, 钟源, 王青, 张冶金, 陈良惠. Study on tapered crossed subwavelength gratings by Fourier modal method[J]. 中国物理B, 2010, 19(10): 104101-104101.

Chen Xi(陈熙), Zhong Yuan(钟源), Wang Qing(王青), Zhang Ye-Jin(张冶金), and Chen Liang-Hui(陈良惠). Study on tapered crossed subwavelength gratings by Fourier modal method[J]. Chin. Phys. B, 2010, 19(10): 104101-104101.

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Study on tapered crossed subwavelength gratings by Fourier modal method

Study on tapered crossed subwavelength gratings by Fourier modal method

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