中国物理B ›› 2000, Vol. 9 ›› Issue (7): 494-499.doi: 10.1088/1009-1963/9/7/004

• NUCLEAR PHYSICS • 上一篇    下一篇

STUDY OF THE NUCLEAR PHENOMENA IN THE LOW ENERGY (60-360 keV) PROTON BEAM IMPLANTATION ON METALS

王铁山, 诸永泰, 王志国, 李松林, 王树金, 靳根明   

  1. Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou 730000, China
  • 收稿日期:1999-09-20 修回日期:1999-12-21 出版日期:2005-06-10 发布日期:2005-06-10
  • 基金资助:
    Project supported in part by the National Natural Science Foundation of China (Grant no. 19845002), the Special Project of the Presidential Foundation of the Chinese Academy of Sciences and also the Special Project of the Nuclear Power Institute of China.

STUDY OF THE NUCLEAR PHENOMENA IN THE LOW ENERGY (60-360 keV) PROTON BEAM IMPLANTATION ON METALS

Wang Tie-shan (王铁山), Zhu Yong-tai (诸永泰), Wang Zhi-guo (王志国), Li Song-lin (李松林), Wang Shu-jin (王树金), Jin Gen-ming (靳根明)   

  1. Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou 730000, China
  • Received:1999-09-20 Revised:1999-12-21 Online:2005-06-10 Published:2005-06-10
  • Supported by:
    Project supported in part by the National Natural Science Foundation of China (Grant no. 19845002), the Special Project of the Presidential Foundation of the Chinese Academy of Sciences and also the Special Project of the Nuclear Power Institute of China.

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摘要： A series of studies on the nuclear interaction and its effects in solids during proton implantation were performed in the energy region between 60 and 360keV. Some charged particle products were observed in the implantation experiments on metal samples such as deuterated titanium, titanium alloy, titanium foil on molybdenum substrate, molybdenum and stainless steel, etc.. The energies of the charged particle products are about 3.9, 5.6 and 8.4MeV, respectively. These particles were identified as alpha particles with both detector telescope and absorption measurements. These three kinds of alpha products were found from different proton sub-barrier reactions. The exciting curve of this reaction increases exponentially with the growth of proton energy in the energy region from 90 to 330keV. The radiation damages induced by the nuclear products in the sample have been studied with scanning electron microscopy technique. The possible surface damages induced by them were observed evidently. The origin of the nuclear reactions and their effect on implantation are discussed.

Abstract: A series of studies on the nuclear interaction and its effects in solids during proton implantation were performed in the energy region between 60 and 360keV. Some charged particle products were observed in the implantation experiments on metal samples such as deuterated titanium, titanium alloy, titanium foil on molybdenum substrate, molybdenum and stainless steel, etc.. The energies of the charged particle products are about 3.9, 5.6 and 8.4MeV, respectively. These particles were identified as alpha particles with both detector telescope and absorption measurements. These three kinds of alpha products were found from different proton sub-barrier reactions. The exciting curve of this reaction increases exponentially with the growth of proton energy in the energy region from 90 to 330keV. The radiation damages induced by the nuclear products in the sample have been studied with scanning electron microscopy technique. The possible surface damages induced by them were observed evidently. The origin of the nuclear reactions and their effect on implantation are discussed.

Key words: low energy proton, nuclear reaction, ion beam implantation

中图分类号:  (Nucleon-induced reactions)

  • 25.40.-h
27.40.+z (39 ≤ A ≤ 58)