中国物理B ›› 2016, Vol. 25 ›› Issue (2): 28102-028102.doi: 10.1088/1674-1056/25/2/028102

• INTERDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY • 上一篇    下一篇

Room temperature NO2 gas sensing of Au-loaded tungsten oxide nanowires/porous silicon hybrid structure

Deng-Feng Wang(王登峰), Ji-Ran Liang(梁继然), Chang-Qing Li(李昌青), Wen-Jun Yan(闫文君), Ming Hu(胡明)   

  1. School of Electronics and Information Engineering, Tianjin University, Tianjin 300072, China
  • 收稿日期:2015-08-28 修回日期:2015-10-10 出版日期:2016-02-05 发布日期:2016-02-05
  • 通讯作者: Ming Hu E-mail:huming@tju.edu.cn
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant Nos. 61274074 and 61271070) and the Key Research Program of Application Foundation and Advanced Technology of Tianjin, China (Grant No. 11JCZDJC15300).

Room temperature NO2 gas sensing of Au-loaded tungsten oxide nanowires/porous silicon hybrid structure

Deng-Feng Wang(王登峰), Ji-Ran Liang(梁继然), Chang-Qing Li(李昌青), Wen-Jun Yan(闫文君), Ming Hu(胡明)   

  1. School of Electronics and Information Engineering, Tianjin University, Tianjin 300072, China
  • Received:2015-08-28 Revised:2015-10-10 Online:2016-02-05 Published:2016-02-05
  • Contact: Ming Hu E-mail:huming@tju.edu.cn
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant Nos. 61274074 and 61271070) and the Key Research Program of Application Foundation and Advanced Technology of Tianjin, China (Grant No. 11JCZDJC15300).

摘要: In this work, we report an enhanced nitrogen dioxide (NO2) gas sensor based on tungsten oxide (WO3) nanowires/porous silicon (PS) decorated with gold (Au) nanoparticles. Au-loaded WO3 nanowires with diameters of 10 nm-25 nm and lengths of 300 nm-500 nm are fabricated by the sputtering method on a porous silicon substrate. The high-resolution transmission electron microscopy (HRTEM) micrographs show that Au nanoparticles are uniformly distributed on the surfaces of WO3 nanowires. The effect of the Au nanoparticles on the NO2-sensing performance of WO3 nanowires/porous silicon is investigated over a low concentration range of 0.2 ppm-5 ppm of NO2 at room temperature (25 ℃). It is found that the 10-Å Au-loaded WO3 nanowires/porous silicon-based sensor possesses the highest gas response characteristic. The underlying mechanism of the enhanced sensing properties of the Au-loaded WO3 nanowires/porous silicon is also discussed.

关键词: Au-loaded, WO3 nanowires, hybrid structure, gas sensing

Abstract: In this work, we report an enhanced nitrogen dioxide (NO2) gas sensor based on tungsten oxide (WO3) nanowires/porous silicon (PS) decorated with gold (Au) nanoparticles. Au-loaded WO3 nanowires with diameters of 10 nm-25 nm and lengths of 300 nm-500 nm are fabricated by the sputtering method on a porous silicon substrate. The high-resolution transmission electron microscopy (HRTEM) micrographs show that Au nanoparticles are uniformly distributed on the surfaces of WO3 nanowires. The effect of the Au nanoparticles on the NO2-sensing performance of WO3 nanowires/porous silicon is investigated over a low concentration range of 0.2 ppm-5 ppm of NO2 at room temperature (25 ℃). It is found that the 10-Å Au-loaded WO3 nanowires/porous silicon-based sensor possesses the highest gas response characteristic. The underlying mechanism of the enhanced sensing properties of the Au-loaded WO3 nanowires/porous silicon is also discussed.

Key words: Au-loaded, WO3 nanowires, hybrid structure, gas sensing

中图分类号:  (Nanoscale materials and structures: fabrication and characterization)

  • 81.07.-b
61.46.Bc (Structure of clusters (e.g., metcars; not fragments of crystals; free or loosely aggregated or loosely attached to a substrate)) 78.67.Sc (Nanoaggregates; nanocomposites) 07.07.Df (Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing)