中国物理B ›› 2009, Vol. 18 ›› Issue (11): 5072-5077.doi: 10.1088/1674-1056/18/11/077

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Analysis and finite element simulation of electromagnetic heating in the nitride MOCVD reactor

李志明, 郝跃, 张进成, 许晟瑞, 倪金玉, 周小伟   

  1. School of Microelectronics, Xidian University, Xi'an 710071, China;Key Laboratory of Ministry of Education for Wide Band-Gap Semiconductor Materials and Devices, Xi'an 710071, China
  • 收稿日期:2008-08-12 修回日期:2009-04-14 出版日期:2009-11-20 发布日期:2009-11-20
  • 基金资助:
    Project supported by the State Key Program of National Natural Science Foundation of China (Grant No 60736033) and the National Natural Science Fund of China (Grant No 60676048).

Analysis and finite element simulation of electromagnetic heating in the nitride MOCVD reactor

Li Zhi-Ming(李志明),Hao Yue(郝跃)†, Zhang Jin-Cheng(张进成), Xu Sheng-Rui(许晟瑞), Ni Jin-Yu(倪金玉), and Zhou Xiao-Wei(周小伟)   

  1. School of Microelectronics, Xidian University, Xi'an 710071, China;Key Laboratory of Ministry of Education for Wide Band-Gap Semiconductor Materials and Devices, Xi'an 710071, China
  • Received:2008-08-12 Revised:2009-04-14 Online:2009-11-20 Published:2009-11-20
  • Supported by:
    Project supported by the State Key Program of National Natural Science Foundation of China (Grant No 60736033) and the National Natural Science Fund of China (Grant No 60676048).

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摘要： Electromagnetic field distribution in the vertical metal organic chemical vapour deposition (MOCVD) reactor is simulated by using the finite element method (FEM). The effects of alternating current frequency, intensity, coil turn number and the distance between the coil turns on the distribution of the Joule heat are analysed separately, and their relations to the value of Joule heat are also investigated. The temperature distribution on the susceptor is also obtained. It is observed that the results of the simulation are in good agreement with previous measurements.

Abstract: Electromagnetic field distribution in the vertical metal organic chemical vapour deposition (MOCVD) reactor is simulated by using the finite element method (FEM). The effects of alternating current frequency, intensity, coil turn number and the distance between the coil turns on the distribution of the Joule heat are analysed separately, and their relations to the value of Joule heat are also investigated. The temperature distribution on the susceptor is also obtained. It is observed that the results of the simulation are in good agreement with previous measurements.

Key words: MOCVD, finite element, electromagnetic heating, Joule heat

中图分类号:  (Computational modeling; simulation)

  • 82.20.Wt
81.15.Gh (Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.)) 02.70.Dh (Finite-element and Galerkin methods)