中国物理B ›› 2014, Vol. 23 ›› Issue (7): 73402-073402.doi: 10.1088/1674-1056/23/7/073402

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A double toroidal analyzer for scanning probe electron energy spectrometer

徐春凯, 张盼科, 郦盟, 陈向军   

  1. Hefei National Laboratory for Physical Science at Microscale and Department of Modern Physics, University of Science and Technology of China, Hefei 230026, China
    Synergetic Innovation Center of Quantum Information and Quantum Physics, University of Science and Technology of China, Hefei 230026, China
  • 收稿日期:2014-02-26 修回日期:2014-03-26 出版日期:2014-07-15 发布日期:2014-07-15
  • 基金资助:
    Project supported by the National Basic Research Program of China (Grant No. 2010CB923301) and the National Natural Science Foundation of China (Grant Nos. 11327404 and 11174268).

A double toroidal analyzer for scanning probe electron energy spectrometer

Xu Chun-Kai (徐春凯), Zhang Pan-Ke (张盼科), Li Meng (郦盟), Chen Xiang-Jun (陈向军)   

  1. Hefei National Laboratory for Physical Science at Microscale and Department of Modern Physics, University of Science and Technology of China, Hefei 230026, China
    Synergetic Innovation Center of Quantum Information and Quantum Physics, University of Science and Technology of China, Hefei 230026, China
  • Received:2014-02-26 Revised:2014-03-26 Online:2014-07-15 Published:2014-07-15
  • Contact: Xu Chun-Kai E-mail:xuck@ustc.edu.cn
  • About author:34.80.-i; 07.50.Ls; 68.49.Jk
  • Supported by:
    Project supported by the National Basic Research Program of China (Grant No. 2010CB923301) and the National Natural Science Foundation of China (Grant Nos. 11327404 and 11174268).

摘要: An ultra-high vacuum (UHV) compatible electron spectrometer employing a double toroidal analyzer has been developed. It is designed to be combined with a custom-made scanning tunneling microscope (STM) to study the spatially localized electron energy spectrum on a surface. A tip-sample system composed of a piezo-driven field-emission tungsten tip and a sample of highly ordered pyrolytic graphite (HOPG) is employed to test the performance of the spectrometer. Two-dimensional images of the energy-resolved and angle-dispersed electrons backscattered from the surface of HOPG are obtained, the performance is optimized and the spectrometer is calibrated. A complete electron energy loss spectrum covering the elastic peak to the secondary electron peaks for the HOPG surface, acquired at a tip voltage of -140 V and a sample current of 0.5 pA, is presented, demonstrating the viability of the spectrometer.

关键词: double toroidal analyzer, scanning probe electron energy spectroscopy, electron energy loss spectroscopy, secondary electron emission spectroscopy

Abstract: An ultra-high vacuum (UHV) compatible electron spectrometer employing a double toroidal analyzer has been developed. It is designed to be combined with a custom-made scanning tunneling microscope (STM) to study the spatially localized electron energy spectrum on a surface. A tip-sample system composed of a piezo-driven field-emission tungsten tip and a sample of highly ordered pyrolytic graphite (HOPG) is employed to test the performance of the spectrometer. Two-dimensional images of the energy-resolved and angle-dispersed electrons backscattered from the surface of HOPG are obtained, the performance is optimized and the spectrometer is calibrated. A complete electron energy loss spectrum covering the elastic peak to the secondary electron peaks for the HOPG surface, acquired at a tip voltage of -140 V and a sample current of 0.5 pA, is presented, demonstrating the viability of the spectrometer.

Key words: double toroidal analyzer, scanning probe electron energy spectroscopy, electron energy loss spectroscopy, secondary electron emission spectroscopy

中图分类号:  (Electron and positron scattering)

  • 34.80.-i
07.50.Ls (Electrometers) 68.49.Jk (Electron scattering from surfaces)