中国物理B ›› 2013, Vol. 22 ›› Issue (11): 117801-117801.doi: 10.1088/1674-1056/22/11/117801

• CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES • 上一篇    下一篇

Optical study of Ba(MnxTi(1-x)O3) thin films by spectroscopic ellipsometry

张婷a b, 殷江a, 丁玲红b, 张伟风b   

  1. a National Laboratory of Solid State Microstructures, Nanjing University, Nanjing 210093, China;
    b Key Laboratory of Photovoltaic Materials of Henan Province, School of Physics and Electronics, Henan University, Kaifeng 475004, China
  • 收稿日期:2013-03-21 修回日期:2013-05-28 出版日期:2013-09-28 发布日期:2013-09-28
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant No. 60976016), the Postdoctoral Science Foundation of China (Grant No. 2012M511250), and the Foundation Co-established by Henan Province and the Ministry of Henan University, China (Grant No. SBGJ090503).

Optical study of Ba(MnxTi(1-x)O3) thin films by spectroscopic ellipsometry

Zhang Ting (张婷)a b, Yin Jiang (殷江)a, Ding Ling-Hong (丁玲红)b, Zhang Wei-Feng (张伟风)b   

  1. a National Laboratory of Solid State Microstructures, Nanjing University, Nanjing 210093, China;
    b Key Laboratory of Photovoltaic Materials of Henan Province, School of Physics and Electronics, Henan University, Kaifeng 475004, China
  • Received:2013-03-21 Revised:2013-05-28 Online:2013-09-28 Published:2013-09-28
  • Contact: Zhang Wei-Feng E-mail:wfzhang@henu.edu.cn
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant No. 60976016), the Postdoctoral Science Foundation of China (Grant No. 2012M511250), and the Foundation Co-established by Henan Province and the Ministry of Henan University, China (Grant No. SBGJ090503).

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摘要： Stoichiometric Ba(MnxTi(1-x)O3) (BMT) thin films with various values of x were deposited on Si(111) substrates by the sol-gel technique. The influence of Mn content on the optical properties was studied by spectroscopic ellipsometry (SE) in the UV–Vis–NIR region. By fitting the measured ellipsometric parameter (Ψ and Δ) with a four-phase model (air/BMT+voids/BMT/Si(111)), the key optical constants of the thin films have been obtained. It was found that the refractive index n and the extinction coefficient k increase with increasing Mn content due to the increase in the packing density. Furthermore, a strong dependence of the optical band gap Eg on Mn/Ti ratios in the deposited films was observed, and it was inferred that the energy level of conduction bands decreases with increasing Mn content.

关键词: Ba(MnxTi(1-x)O3) (BMT) thin films, spectroscopic ellipsometry, refractive index, extinction coefficient

Abstract: Stoichiometric Ba(MnxTi(1-x)O3) (BMT) thin films with various values of x were deposited on Si(111) substrates by the sol-gel technique. The influence of Mn content on the optical properties was studied by spectroscopic ellipsometry (SE) in the UV–Vis–NIR region. By fitting the measured ellipsometric parameter (Ψ and Δ) with a four-phase model (air/BMT+voids/BMT/Si(111)), the key optical constants of the thin films have been obtained. It was found that the refractive index n and the extinction coefficient k increase with increasing Mn content due to the increase in the packing density. Furthermore, a strong dependence of the optical band gap Eg on Mn/Ti ratios in the deposited films was observed, and it was inferred that the energy level of conduction bands decreases with increasing Mn content.

Key words: Ba(MnxTi(1-x)O3) (BMT) thin films, spectroscopic ellipsometry, refractive index, extinction coefficient

中图分类号:  (Theory, models, and numerical simulation)

  • 78.20.Bh
78.20.Ci (Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity)) 78.66.-w (Optical properties of specific thin films) 78.68.+m (Optical properties of surfaces)