The study of the valence-shell excitations of chlorotrifluoromethane by fast electron impact

The oscillator strengths and cross sections of the valence-shell excitations in chlorotrifluoromethane (CF₃Cl) are highly important for understanding atmospheric evolution and modeling plasma etching. In this work, absolute generalized oscillator strengths (GOSs) for these excitations were measured by an angle-resolved electron energy loss spectrometer operating at a collision energy of 1500 eV and an energy resolution of approximately 120 meV. By extrapolating the GOSs to zero momentum transfer, the optical oscillator strengths (OOSs) were determined. In addition, using the BE-scaling method, the integral cross sections (ICSs) for the corresponding excitations were calculated from the threshold energies up to 5000 eV. The presently obtained data provide an independent verification of the previous findings and contribute to the fundamental molecular database of CF₃Cl. The datasets presented in this paper, including the GOSs, OOSs and ICSs, are openly available at https://doi.org/10.57760/sciencedb.j00113.00346 (https://www.scidb.cn/s/Uz26Fb).