Micro/Nano-Fabrication Laboratory

Micro/nano configurations are indispensable characters in frontier devices, for example, quantum processors and nano-optical devices. However, their realization needs the nanofabricating techniques to have the capacities of high precision, extreme feature sizes, and abundant controllable of freedom. These complex demands come to be a huge challenge which hinders the further development of the related applications. In this paper, we introduce the instruments, process development, and the important advancements of Micro/Nano-Fabrication Laboratory (LMF) that located at the Synergetic Extreme Condition User Facility (SECUF). With the aims of meeting fabrication needs of micro/nano structures and devices for SECUF users, LMF is equipped with more than 50 sets of instruments ranging from lithography, etching, deposition, characterization, and their auxiliary systems. Based on the advanced equipment, LMF has developed a series of method toward multidimensional controllable nanostructures, where the minimum linewidth of the typical configurations down to 8 nm, aspect ratio reaches 18:1, and fabricating precision of atomic scale. LMF has attracted users from over 100 institutions to conduct their research in quantum, photonics, and many other fields. Especially, in quantum devices, superconducting quantum processors with qubits up to 78 have been fabricated, supporting the establishment of the Quafu quantum cloud computing cluster. In nanophotonics, users can conduct research ranging from optical quantum computing, metasurfaces, grating waveguide, and high quality factor (Q) optical cavities. LMF serves as a platform for applications under extreme environments, providing a comprehensive strategy for users to explore the fascinating physical world.