Aberration compensation of optical tweezers for single-atom array

High-precision preparation of holographic optical tweezers, which is a critical requirement for neutral atom quantum computing platforms, faces the challenge of system aberrations that degrade trap performance. In this paper, we propose a simple and efficient aberration correction algorithm for wavefront-sensorless optical systems, based on correcting the relative lateral shift of diffracted light across spatial regions. Applied to a cold atomic system, this technique demonstrates active correction of aberrations up to several wavelengths, reducing them to a peak-to-valley difference of \(0.19(3)\lambda\). The diffraction spot quality and optical trap depth are significantly improved after aberration correction. Combined with subsequent array optimization, the technique enables the generation of uniform optical trap arrays with enhanced atom-loading efficiency. The method requires no prior wavefront information or additional hardware, utilizing only an SLM and a standard CCD camera. Its computational efficiency and hardware simplicity make it broadly applicable to fields such as laser lithography and microscopy.