Glancing incidence x-ray fluorescence spectrometry based on a single-bounce parabolic capillary

Glancing incidence x-ray fluorescence spectrometry using a single-bounce parabolic capillary is proposed for the analysis of layered samples. The divergence of the x-ray beam was 0.33 mrad. In this paper, we used this instrumental setup to analyze a Si single crystal and a 50 nm HfO₂ single-layer film deposited on a Si substrate.