Cite this article:
Zhang Jian, He Jin, Zhang Li-Ning. One-dimensional continuous analytic potential solution to generic oxide-silicon-oxide systemJ. Chin. Phys. B, 2010, 19(6): 067304.
| Zhang Jian, He Jin, Zhang Li-Ning. One-dimensional continuous analytic potential solution to generic oxide-silicon-oxide systemJ. Chin. Phys. B, 2010, 19(6): 067304. |
One-dimensional continuous analytic potential solution to generic oxide-silicon-oxide system
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Abstract
A one-dimensional continuous analytic potential solution to a generic oxide--silicon--oxide system is developed. With the analytic solution, the potential distribution in the silicon film is predicted. A physics-based relation between surface potentials is also derived and then applied to the generic oxide--silicon--oxide metal--oxide--semiconductor field-effect transistors (MOSFETs) for the calculation of surface potentials -
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