A novel highly efficient grating coupler with large filling factor used for optoelectronic integration

A novel highly efficient grating coupler with large filling factor and deep etching is proposed in silicon-on-insulator for near vertical coupling between the rib waveguide and optical fibre. The deep slots acting as high efficient scattering centres are analysed and optimized. As high as 60% coupling efficiency at telecom wavelength of 1550-nm and 3-dB bandwidth of 61 nm are predicted by simulation. A peak coupling efficiency of 42.1% at wavelength 1546-nm and 3-dB bandwidth of 37.6 nm are obtained experimentally.