EMISSION AND MASS SPECTRAL ANALYSES OF LASER ABLATED AlN PLUMES

The emission spectrum of the ³Π_i-³Π_i (0－0) AlN band and some N⁺ and N emission lines have been studied in the visible region for the laser ablated plumes. The Stark-shift and Stark broadening were observed. The component species in the ablated plumes were analyzed by time of flight mass spectroscopy. The electron density and the temperature were calculated from the Stark-shift and Stark broadening of N(²D) emission line. The densities of AlN⁺, Al⁺, N⁺, AlN, N and Al were estimated by the mass spectra and the Saha equation.