LASER MOLECULAR BEAM EPITAXY SYSTEM AND ITS KEY TECHNOLOGIES

The laser molecular beam epitaxy system and its key technologies have been successfully developed in China. Atomically regulated unit-cell by unit-cell homoepitaxial SrTiO₃ (STO) and heteroepitaxial BaTiO₃ (BTO) films and STO/BTO superlattices were fabricated on STO (100) substrates by the laser molecular beam epitaxy. The fine streak patterns and more than 1000 cycles of undamping intensity oscillation were obtained by using in-situ reflection high-energy electron diffraction. The surfaces of films are atomically smooth.