A MBE ON-LINE OPTICAL MODULATION PHOTOREFLECTANCE ANALYSIS SYSTEM

An on-line optical modulation photoreflectance (PR) spectroscopy analysis system asso-cinted with the molecular beam epitaxy (MBE) system has been designed and established. This paper reports in detail the optical design, the experimental arrangement, and the adjust-ment of the system. GaAs film samples grown by MBE on Si-substrate have been measured with this on-line system. The results show that the on-line PR spectroscopy can characterize the quality of the as-grown film samples qualitatively and promptly.