STUDIES ON INFRARED AND PHOTOLUMINESCENCE PROPERTIES OF CdIn₂O₄ FILMS DEPOSITED BY RF REACTIVE SPUTTERING

Transparent and conductive CdIn₂O₄(CIO) thin films were prepared successfully by rf reactive sputtering from a Cd-In alloy target in an Ar+O₂ atmosphere. The measurement of transmission and reflection spectra, at wavelengths between 0.2 and 6.0μm, and photoluminescence spectrum of the films are reported. The optical properties of the films are analyzed and discussed in detail. Two reasonable methods for calculating the effective mass of the free carrier in the films are presented.