Micron-sized fiber diamond probe for quantum precision measurement of microwave magnetic field

We present a quantitative measurement of the horizontal component of the microwave magnetic field of a coplanar waveguide using a quantum diamond probe in fiber format. The measurement results are compared in detail with simulation, showing a good consistence. Further simulation shows fiber diamond probe brings negligible disturbance to the field under measurement compared to bulk diamond. This method will find important applications ranging from electromagnetic compatibility test and failure analysis of high frequency and high complexity integrated circuits.