Design and simulation of a silicon-based hybrid integrated optical gyroscope system

By combining a silicon-based lithium niobate modulator and a silicon-based Si ₃N ₄ resonator with silicon-based photonics technology, a highly systematic design of a hybrid integrated optical gyroscope with enhanced reciprocity sensitivity and a dual micro-ring structure is proposed for the first time in this paper. The relationship between the device’s structural parameters and optical performance is also analyzed by constructing a complete simulation link, which provides a theoretical design reference to improve the system’s sensitivity. When the wavelength is 1550 nm, the conversion frequency of the dual-ring optical path is 50 MHz, the coupling coefficient is 0.2, and the radius R is 1000 μm, the quality factor of the silicon-based Si ₃N ₄ resonator is 2.58 × 10 ⁵, which is 1.58 times that of the silicon-on-insulator resonator. Moreover, the effective number of times the light travels around the ring before leaving the micro-ring is 5.93, which is 1.62 times that of the silicon-on-insulator resonator. The work fits the gyro dynamic output diagram, and solves the problem of low sensitivity at low speed by setting the phase offset. This results provide a basis for the further optimization of design and chip processing of the integrated optical gyroscope.