Fabrication and characterization of superconducting multiqubit device with niobium base layer

Superconducting transmon qubits are the leading platform in solid-state quantum computing and quantum simulation applications. In this work, we develop a fabrication process for the transmon multiqubit device with a niobium base layer, shadow-evaporated Josephson junctions, and airbridges across the qubit control lines to suppress crosstalk. Our results show that these multiqubit devices have well-characterized readout resonators, and that the energy relaxation and Ramsey (spin-echo) dephasing times are up to ～ 40 μs and 14 (47) μs, respectively. We perform single-qubit gate operations that demonstrate a maximum gate fidelity of 99.97%. In addition, two-qubit vacuum Rabi oscillations are measured to evaluate the coupling strength between qubits, and the crosstalk among qubits is found to be less than 1% with the fabricated airbridges. Further improvements in qubit coherence performance using this fabrication process are also discussed.