Effect of Mo doping on phase change performance of Sb₂Te₃

Mo, as a dopant, is doped into SbTe to improve its thermal stability. It is shown in this paper that the Mo-doped Sb₂Te₃ (Mo_0.26Sb₂Te₃, MST) material possesses phase change memory (PCM) applications. MST has better thermal stability than Sb₂Te₃(ST) and will crystallize only when the annealing temperature is higher than 250 ℃. With the good thermal stability, MST-based PCM cells have a fast crystallization time of 6 ns. Furthermore, endurance up to 4×10⁵ cycles with a resistance ratio of more than one order of magnitude makes MST a promising candidate for PCM applications.