Study on the nitridation of β-Ga₂O₃ films

Single-crystal GaN layers have been obtained by nitriding β-Ga₂O₃ films in NH₃ atmosphere. The effect of the temperature and time on the nitridation and conversion of Ga₂O₃ films have been investigated. The nitridation process results in lots of holes in the surface of films. The higher nitridation temperature and longer time can promote the nitridation and improve the crystal quality of GaN films. The converted GaN porous films show the single-crystal structures and low-stress, which can be used as templates for the epitaxial growth of high-quality GaN.