Theoretical investigation of hierarchical sub-wavelength photonic structures fabricated using high-order waveguide-mode interference lithograph

This paper presents the theoretical investigation of hierarchical sub-wavelength photonic structures with various periods and numbers of layers, which were fabricated using a high-order waveguide-mode interference field. A 442-nm laser was used to excite high-order waveguide modes in an asymmetric metal-cladding dielectric waveguide structure. The dispersion curve of the waveguide modes was theoretically analyzed, and the distribution of the interference field of high-order waveguide modes was numerically simulated using the finite-element method. The various dependences of the characteristics of hierarchical sub-wavelength photonic structures on the thickness and refractive index of the photoresist and the waveguide mode were investigated in detail. These hierarchical sub-wavelength photonic structures have various periods and numbers of layers and can be fabricated by a simple and low-cost method.