Cite this article:
Yu Jun-Ting, Chen Shu-Ming, Chen Jian-Jun, Huang Peng-Cheng. Fin width and height dependence of bipolar amplification in bulk FinFETs submitted to heavy ion irradiationJ. Chin. Phys. B, 2015, 24(11): 119401.
| Yu Jun-Ting, Chen Shu-Ming, Chen Jian-Jun, Huang Peng-Cheng. Fin width and height dependence of bipolar amplification in bulk FinFETs submitted to heavy ion irradiationJ. Chin. Phys. B, 2015, 24(11): 119401. |
Fin width and height dependence of bipolar amplification in bulk FinFETs submitted to heavy ion irradiation
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Abstract
FinFET technologies are becoming the mainstream process as technology scales down. Based on a 28-nm bulk p-FinFET device, we have investigated the fin width and height dependence of bipolar amplification for heavy-ion-irradiated FinFETs by 3D TCAD numerical simulation. Simulation results show that due to a well bipolar conduction mechanism rather than a channel (fin) conduction path, the transistors with narrower fins exhibit a diminished bipolar amplification effect, while the fin height presents a trivial effect on the bipolar amplification and charge collection. The results also indicate that the single event transient (SET) pulse width can be mitigated about 35% at least by optimizing the ratio of fin width and height, which can provide guidance for radiation-hardened applications in bulk FinFET technology. -
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