Photoluminescence of silicone oil treated by fluorocarbon plasma

We investigated the photoluminescence characteristics of the silicone oils treated by C₂F₆ and CHF₃ plasma. The silicone oil treated by the C₂F₆ plasma emitted a white light mainly composed of 415 nm, 469 nm, and 554 nm emissions, while that treated by the CHF₃ plasma emitted a pink light (415 nm). Fourier transformed infrared spectroscopy and Raman spectroscopy studies showed that the photoluminescence correlated with the Si-C bond, the carbon-related defects, and the oxygen vacancies. It was suggested that the light emitting at 554 nm was related to the Si-C bond and the carbon-related defects, while the pink emission at 415 nm was related to the oxygen vacancies.