The effects of heat treatment on microfluidic devices fabricated in silica glass by femtosecond lasers

We fabricated complex microfluidic devices in silica glass by water-assisted femtosecond laser ablation and subsequent heat treatment. The experimental results show that after heat treatment, the diameter of the microchannels is significantly reduced and the internal surface roughness is improved. The diameters of the fabricated microchannels can be modulated by changing the annealing temperature and the annealing time. During annealing, the temperature affects the diameter and shape of the protrusions in microfluidic devices very strongly, and these changes are mainly caused by uniform expansion and the action of surface tension.