A comparison of silicon oxide and nitride as host matrices on the photoluminescence from Er⁺ ions

This paper compares the properties of silicon oxide and nitride as host matrices for Er ions. Erbium-doped silicon nitride films were deposited by a plasma-enhanced chemical-vapour deposition system. After deposition, the films were implanted with Er³⁺ at different doses. Er-doped thermal grown silicon oxide films were prepared at the same time as references. Photoluminescence features of Er³⁺ were inspected systematically. It is found that silicon nitride films are suitable for high concentration doping and the thermal quenching effect is not severe. However, a very high annealing temperature up to 1200 ℃ is needed to optically activate Er³⁺, which may be the main obstacle to impede the application of Er-doped silicon nitride.