Experimental study of noncontact ultrasonic motor with non-symmetrical electrode

We have proposed a novel noncontact ultrasonic motor based on non-symmetrical electrode driving. The configuration of this electrode and the fabrication process of rotors are presented. Its vibration characteristics are computed and analysed by using the finite element method and studied experimentally. Good agreement between them is obtained. Moreover, it is also shown that this noncontact ultrasonic motor is operated in antisymmetric radial vibration mode of B_21 mode. The maximum revolution speed for three-blade and six-blade rotors are 5100 and 3700 r/min at an input voltage of 20V, respectively. Also, the noncontact high-speed revolution of the rotors can be realized by the parts of I, III of the electrode or II, IV of the electrode. The levitation distance between the stator and rotor is about 140\mu m according to the theoretical calculation and the experimental measurement.