Study of nanocrystalline Fe－Al－N soft magnetic thin films

Fe－Al－N films were fabricated by reactive sputtering using a radio-frequency magnetron sputtering system. The effects of Al and N content and annealing temperature on microstructure and magnetic properties were investigated. The Fe－Al－N films, which have good soft magnetic properties, consist of nanocrystalline α-Fe grains and a small amount of other phases in the boundaries of \alpha-Fe grains. The average \alpha-Fe grain size is about 10－15nm. A slight amount of Fe－N and Al－N compounds precipitate in the boundaries of \alpha-Fe grains and suppress their growth. Annealing improves the soft magnetic properties slightly by releasing the residual stress and reducing defects.