MAGNETIC FIELD GRADIENT EFFECTS ON ION FLUX BEHAVIORS IN ECR PLASMA SOURCES

The available electron cyclotron resonance plasma source has been simulated in two-dimensional configuration space (z, r) and three-dimensional velocity space (V_z, V_r, V_\theta). The simulation is focused on the magnetic field gradient effects on ion flux behaviors in electron cyclotron resonance plasma sources. The simulation results show that, when the magnetic field gradients increase, electron temperature, plasma density, ionization rate, and ion flux in Z-direction would decrease, while ion energy and plasma potential would increase.