Li ION BACKSCATTERING STUDY ON HIGH-T_c YBaCuO AND GdBaCuO SUPERCONDUCTOR FILMS

Rutherford backscattering (RBS) measurements of 4.2 MeV Li and 2.4 MeV He ions were done for YBaCuO and GdBaCuO high-T_c, superconductor films deposited on MgO and SrTiO₃ single crystalline substrates and for their bulk samples. Energy spectra of both ions were calculated using the RBS analysis program rewritten by the authors. Comparisons between these two non-destructive tech-niques showed some advantages in analyzing the layer thickness and composition ratios of those thin films by MeV Li ions backscattering. Estimated errors are within 7 % for the measured elemental con-centrations and l0 % for the layer thickness in our experiments. A brief discussion is also made of the results.