DIFFUSIVE AGGREGATION ON ION IMPLANTED THIN FILMS

Diffusive aggregation on-ion implanted thin films is studied. It is revealed that aggregation is realized mainly by atoms or clusters in the film matrix. The implanting ions play the role of triggering them into motion and supplying the kinetic energy for their diffusion. The aggregation process is characterized by finite density of aggregating particles, random triggering, and limited diffusion distance. The aggregate observed shows scaling or fractal property.