Thermal stability of magnetron sputtering Ge–Ga

Thermal stability of magnetron sputtering Ge–Ga–S films

Niu Lei¹, Chen Yimin^{1, 2, †}, Shen Xiang^{1, ‡}, Xu Tiefeng¹

Linear refractive index at 1550 nm wavelength for the as-deposited films as a function of MCN.