Thermal stability of magnetron sputtering Ge–Ga

Thermal stability of magnetron sputtering Ge–Ga–S films

Niu Lei¹, Chen Yimin^{1, 2, †}, Shen Xiang^{1, ‡}, Xu Tiefeng¹

Fitting results of Ψ and Δ for fresh Ge_27.4Ga_7.3S_65.3 film by the Cauchy model. Two test angles (65° and 75°) are employed here.