Comparative study on characteristics of Si-based AlGaN/GaN recessed MIS-HEMTs with HfO
2
and Al
2
O
3
gate insulators
Zhao Yao-Peng
, Wang Chong
†
, Zheng Xue-Feng
‡
, Ma Xiao-Hua
, Liu Kai
, Li Ang
, He Yun-Long
, Hao Yue
Molecular structure diagram of HfO
2
/AlGaN and Al
2
O
3
/AlGaN interfaces.